12/29/2010	8:12:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/29/2010	8:12:20 AM	Recipe started at 8:12 AM
12/29/2010	8:12:20 AM	H2 valve closed
12/29/2010	8:12:20 AM	BCl3 valve closed
12/29/2010	8:12:20 AM	PH3 valve closed
12/29/2010	8:12:20 AM	SiCl4 pre valve closed
12/29/2010	8:12:20 AM	SiCl4 post valve closed
12/29/2010	8:12:20 AM	Main Vac valve closed
12/29/2010	8:12:20 AM	Bypass valve closed
12/29/2010	8:12:20 AM	Bubbler valve closed
12/29/2010	8:12:20 AM	Helium valve opened
12/29/2010	8:12:20 AM	Helium MFC set to  500.000000
12/29/2010	8:12:20 AM	H2 MFC set to  0.000000
12/29/2010	8:12:20 AM	BCl3 MFC set to  0.000000
12/29/2010	8:12:20 AM	PHl3 MFC set to  0.000000
12/29/2010	8:12:20 AM	SiCl4 MFC set to  0.000000
12/29/2010	8:12:20 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	8:12:20 AM	Tube furnace set to 0
12/29/2010	8:12:26 AM	Helium valve closed
12/29/2010	8:12:26 AM	H2 valve closed
12/29/2010	8:12:26 AM	BCl3 valve closed
12/29/2010	8:12:26 AM	PH3 valve closed
12/29/2010	8:12:26 AM	SiCl4 pre valve closed
12/29/2010	8:12:26 AM	SiCl4 post valve closed
12/29/2010	8:12:26 AM	Main Vac valve closed
12/29/2010	8:12:26 AM	Bypass valve closed
12/29/2010	8:12:26 AM	Bubbler valve closed
12/29/2010	8:12:26 AM	Helium MFC set to  0.000000
12/29/2010	8:12:26 AM	H2 MFC set to  0.000000
12/29/2010	8:12:26 AM	BCl3 MFC set to  0.000000
12/29/2010	8:12:26 AM	PHl3 MFC set to  0.000000
12/29/2010	8:12:26 AM	SiCl4 MFC set to  0.000000
12/29/2010	8:12:26 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	8:12:26 AM	Tube furnace set to 0
12/29/2010	8:12:26 AM	Run finished at 8:12 AM
12/29/2010	8:12:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/29/2010	9:45:41 AM	Program started after a nonstandard shutdown
12/29/2010	9:45:41 AM	Helium valve closed
12/29/2010	9:45:41 AM	H2 valve closed
12/29/2010	9:45:41 AM	BCl3 valve closed
12/29/2010	9:45:41 AM	PH3 valve closed
12/29/2010	9:45:41 AM	SiCl4 pre valve closed
12/29/2010	9:45:41 AM	SiCl4 post valve closed
12/29/2010	9:45:41 AM	Main Vac valve closed
12/29/2010	9:45:41 AM	Bypass valve closed
12/29/2010	9:45:41 AM	Bubbler valve closed
12/29/2010	9:45:41 AM	Helium MFC set to  0.000000
12/29/2010	9:45:41 AM	H2 MFC set to  0.000000
12/29/2010	9:45:41 AM	BCl3 MFC set to  0.000000
12/29/2010	9:45:41 AM	PHl3 MFC set to  0.000000
12/29/2010	9:45:41 AM	SiCl4 MFC set to  0.000000
12/29/2010	9:45:41 AM	Bypass solenoid MFC set to  760.000000
12/29/2010	9:45:42 AM	Tube furnace set to 0
12/29/2010	9:56:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	9:56:23 AM	Recipe started at 9:56 AM
12/29/2010	9:56:23 AM	Helium valve closed
12/29/2010	9:56:23 AM	H2 valve closed
12/29/2010	9:56:23 AM	BCl3 valve closed
12/29/2010	9:56:23 AM	PH3 valve closed
12/29/2010	9:56:23 AM	SiCl4 pre valve closed
12/29/2010	9:56:23 AM	SiCl4 post valve closed
12/29/2010	9:56:23 AM	Main Vac valve closed
12/29/2010	9:56:23 AM	Bubbler valve closed
12/29/2010	9:56:23 AM	Bypass valve opened
12/29/2010	9:56:23 AM	Helium MFC set to  0.000000
12/29/2010	9:56:23 AM	H2 MFC set to  0.000000
12/29/2010	9:56:23 AM	BCl3 MFC set to  0.000000
12/29/2010	9:56:23 AM	PHl3 MFC set to  0.000000
12/29/2010	9:56:23 AM	SiCl4 MFC set to  0.000000
12/29/2010	9:56:23 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	9:56:23 AM	Tube furnace set to 0
12/29/2010	9:57:27 AM	Helium valve closed
12/29/2010	9:57:27 AM	H2 valve closed
12/29/2010	9:57:27 AM	BCl3 valve closed
12/29/2010	9:57:27 AM	PH3 valve closed
12/29/2010	9:57:27 AM	SiCl4 pre valve closed
12/29/2010	9:57:27 AM	SiCl4 post valve closed
12/29/2010	9:57:27 AM	Bubbler valve closed
12/29/2010	9:57:27 AM	Main Vac valve opened
12/29/2010	9:57:27 AM	Bypass valve opened
12/29/2010	9:57:27 AM	Helium MFC set to  0.000000
12/29/2010	9:57:27 AM	H2 MFC set to  0.000000
12/29/2010	9:57:27 AM	BCl3 MFC set to  0.000000
12/29/2010	9:57:27 AM	PHl3 MFC set to  0.000000
12/29/2010	9:57:27 AM	SiCl4 MFC set to  0.000000
12/29/2010	9:57:27 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	9:57:28 AM	Tube furnace set to 0
12/29/2010	9:57:28 AM	Run finished at 9:57 AM
12/29/2010	9:57:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	10:16:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	10:16:13 AM	Recipe started at 10:16 AM
12/29/2010	10:16:13 AM	Helium valve closed
12/29/2010	10:16:13 AM	H2 valve closed
12/29/2010	10:16:13 AM	BCl3 valve closed
12/29/2010	10:16:13 AM	PH3 valve closed
12/29/2010	10:16:13 AM	SiCl4 pre valve closed
12/29/2010	10:16:13 AM	SiCl4 post valve closed
12/29/2010	10:16:13 AM	Main Vac valve closed
12/29/2010	10:16:13 AM	Bypass valve closed
12/29/2010	10:16:13 AM	Bubbler valve closed
12/29/2010	10:16:13 AM	Helium MFC set to  0.000000
12/29/2010	10:16:13 AM	H2 MFC set to  0.000000
12/29/2010	10:16:13 AM	BCl3 MFC set to  0.000000
12/29/2010	10:16:13 AM	PHl3 MFC set to  0.000000
12/29/2010	10:16:13 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:16:13 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:16:13 AM	Tube furnace set to 0
12/29/2010	10:16:14 AM	Run finished at 10:16 AM
12/29/2010	10:16:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	10:16:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	10:16:44 AM	Recipe started at 10:16 AM
12/29/2010	10:16:44 AM	Helium valve closed
12/29/2010	10:16:44 AM	H2 valve closed
12/29/2010	10:16:44 AM	BCl3 valve closed
12/29/2010	10:16:44 AM	PH3 valve closed
12/29/2010	10:16:44 AM	SiCl4 pre valve closed
12/29/2010	10:16:44 AM	SiCl4 post valve closed
12/29/2010	10:16:44 AM	Main Vac valve closed
12/29/2010	10:16:44 AM	Bubbler valve closed
12/29/2010	10:16:44 AM	Bypass valve opened
12/29/2010	10:16:44 AM	Helium MFC set to  0.000000
12/29/2010	10:16:44 AM	H2 MFC set to  0.000000
12/29/2010	10:16:44 AM	BCl3 MFC set to  0.000000
12/29/2010	10:16:44 AM	PHl3 MFC set to  0.000000
12/29/2010	10:16:44 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:16:44 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:16:44 AM	Tube furnace set to 0
12/29/2010	10:16:45 AM	Helium valve closed
12/29/2010	10:16:45 AM	H2 valve closed
12/29/2010	10:16:45 AM	BCl3 valve closed
12/29/2010	10:16:45 AM	PH3 valve closed
12/29/2010	10:16:45 AM	SiCl4 pre valve closed
12/29/2010	10:16:45 AM	SiCl4 post valve closed
12/29/2010	10:16:45 AM	Bubbler valve closed
12/29/2010	10:16:45 AM	Main Vac valve opened
12/29/2010	10:16:45 AM	Bypass valve opened
12/29/2010	10:16:45 AM	Helium MFC set to  0.000000
12/29/2010	10:16:45 AM	H2 MFC set to  0.000000
12/29/2010	10:16:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:16:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:16:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:16:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:16:45 AM	Tube furnace set to 0
12/29/2010	10:17:45 AM	H2 valve closed
12/29/2010	10:17:45 AM	BCl3 valve closed
12/29/2010	10:17:45 AM	PH3 valve closed
12/29/2010	10:17:45 AM	SiCl4 pre valve closed
12/29/2010	10:17:45 AM	SiCl4 post valve closed
12/29/2010	10:17:45 AM	Bubbler valve closed
12/29/2010	10:17:45 AM	Helium valve opened
12/29/2010	10:17:45 AM	Main Vac valve opened
12/29/2010	10:17:45 AM	Bypass valve opened
12/29/2010	10:17:45 AM	Helium MFC set to  100.000000
12/29/2010	10:17:45 AM	H2 MFC set to  0.000000
12/29/2010	10:17:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:17:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:17:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:17:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:17:45 AM	Tube furnace set to 0
12/29/2010	10:18:45 AM	Helium valve closed
12/29/2010	10:18:45 AM	H2 valve closed
12/29/2010	10:18:45 AM	BCl3 valve closed
12/29/2010	10:18:45 AM	PH3 valve closed
12/29/2010	10:18:45 AM	SiCl4 pre valve closed
12/29/2010	10:18:45 AM	SiCl4 post valve closed
12/29/2010	10:18:45 AM	Bubbler valve closed
12/29/2010	10:18:45 AM	Main Vac valve opened
12/29/2010	10:18:45 AM	Bypass valve opened
12/29/2010	10:18:45 AM	Helium MFC set to  0.000000
12/29/2010	10:18:45 AM	H2 MFC set to  0.000000
12/29/2010	10:18:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:18:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:18:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:18:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:18:45 AM	Tube furnace set to 0
12/29/2010	10:19:45 AM	H2 valve closed
12/29/2010	10:19:45 AM	BCl3 valve closed
12/29/2010	10:19:45 AM	PH3 valve closed
12/29/2010	10:19:45 AM	SiCl4 pre valve closed
12/29/2010	10:19:45 AM	SiCl4 post valve closed
12/29/2010	10:19:45 AM	Bubbler valve closed
12/29/2010	10:19:45 AM	Helium valve opened
12/29/2010	10:19:45 AM	Main Vac valve opened
12/29/2010	10:19:45 AM	Bypass valve opened
12/29/2010	10:19:45 AM	Helium MFC set to  100.000000
12/29/2010	10:19:45 AM	H2 MFC set to  0.000000
12/29/2010	10:19:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:19:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:19:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:19:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:19:46 AM	Tube furnace set to 0
12/29/2010	10:20:46 AM	Helium valve closed
12/29/2010	10:20:46 AM	H2 valve closed
12/29/2010	10:20:46 AM	BCl3 valve closed
12/29/2010	10:20:46 AM	PH3 valve closed
12/29/2010	10:20:46 AM	SiCl4 pre valve closed
12/29/2010	10:20:46 AM	SiCl4 post valve closed
12/29/2010	10:20:46 AM	Bubbler valve closed
12/29/2010	10:20:46 AM	Main Vac valve opened
12/29/2010	10:20:46 AM	Bypass valve opened
12/29/2010	10:20:46 AM	Helium MFC set to  0.000000
12/29/2010	10:20:46 AM	H2 MFC set to  0.000000
12/29/2010	10:20:46 AM	BCl3 MFC set to  0.000000
12/29/2010	10:20:46 AM	PHl3 MFC set to  0.000000
12/29/2010	10:20:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:20:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:20:46 AM	Tube furnace set to 0
12/29/2010	10:21:46 AM	H2 valve closed
12/29/2010	10:21:46 AM	BCl3 valve closed
12/29/2010	10:21:46 AM	PH3 valve closed
12/29/2010	10:21:46 AM	SiCl4 pre valve closed
12/29/2010	10:21:46 AM	SiCl4 post valve closed
12/29/2010	10:21:46 AM	Bubbler valve closed
12/29/2010	10:21:46 AM	Helium valve opened
12/29/2010	10:21:46 AM	Main Vac valve opened
12/29/2010	10:21:46 AM	Bypass valve opened
12/29/2010	10:21:46 AM	Helium MFC set to  100.000000
12/29/2010	10:21:46 AM	H2 MFC set to  0.000000
12/29/2010	10:21:46 AM	BCl3 MFC set to  0.000000
12/29/2010	10:21:46 AM	PHl3 MFC set to  0.000000
12/29/2010	10:21:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:21:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:21:46 AM	Tube furnace set to 0
12/29/2010	10:22:46 AM	Helium valve closed
12/29/2010	10:22:46 AM	H2 valve closed
12/29/2010	10:22:46 AM	BCl3 valve closed
12/29/2010	10:22:46 AM	PH3 valve closed
12/29/2010	10:22:46 AM	SiCl4 pre valve closed
12/29/2010	10:22:46 AM	SiCl4 post valve closed
12/29/2010	10:22:46 AM	Bubbler valve closed
12/29/2010	10:22:46 AM	Main Vac valve opened
12/29/2010	10:22:46 AM	Bypass valve opened
12/29/2010	10:22:46 AM	Helium MFC set to  0.000000
12/29/2010	10:22:46 AM	H2 MFC set to  0.000000
12/29/2010	10:22:46 AM	BCl3 MFC set to  0.000000
12/29/2010	10:22:46 AM	PHl3 MFC set to  0.000000
12/29/2010	10:22:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:22:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:22:46 AM	Tube furnace set to 0
12/29/2010	10:23:46 AM	H2 valve closed
12/29/2010	10:23:46 AM	BCl3 valve closed
12/29/2010	10:23:46 AM	PH3 valve closed
12/29/2010	10:23:46 AM	SiCl4 pre valve closed
12/29/2010	10:23:46 AM	SiCl4 post valve closed
12/29/2010	10:23:46 AM	Bubbler valve closed
12/29/2010	10:23:46 AM	Helium valve opened
12/29/2010	10:23:46 AM	Main Vac valve opened
12/29/2010	10:23:46 AM	Bypass valve opened
12/29/2010	10:23:46 AM	Helium MFC set to  100.000000
12/29/2010	10:23:46 AM	H2 MFC set to  0.000000
12/29/2010	10:23:46 AM	BCl3 MFC set to  0.000000
12/29/2010	10:23:46 AM	PHl3 MFC set to  0.000000
12/29/2010	10:23:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:23:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:23:46 AM	Tube furnace set to 0
12/29/2010	10:24:46 AM	Helium valve closed
12/29/2010	10:24:46 AM	H2 valve closed
12/29/2010	10:24:46 AM	BCl3 valve closed
12/29/2010	10:24:46 AM	PH3 valve closed
12/29/2010	10:24:46 AM	SiCl4 pre valve closed
12/29/2010	10:24:46 AM	SiCl4 post valve closed
12/29/2010	10:24:46 AM	Bubbler valve closed
12/29/2010	10:24:46 AM	Main Vac valve opened
12/29/2010	10:24:46 AM	Bypass valve opened
12/29/2010	10:24:46 AM	Helium MFC set to  0.000000
12/29/2010	10:24:46 AM	H2 MFC set to  0.000000
12/29/2010	10:24:46 AM	BCl3 MFC set to  0.000000
12/29/2010	10:24:46 AM	PHl3 MFC set to  0.000000
12/29/2010	10:24:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:24:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:24:47 AM	Tube furnace set to 0
12/29/2010	10:25:47 AM	H2 valve closed
12/29/2010	10:25:47 AM	BCl3 valve closed
12/29/2010	10:25:47 AM	PH3 valve closed
12/29/2010	10:25:47 AM	SiCl4 pre valve closed
12/29/2010	10:25:47 AM	SiCl4 post valve closed
12/29/2010	10:25:47 AM	Bubbler valve closed
12/29/2010	10:25:47 AM	Helium valve opened
12/29/2010	10:25:47 AM	Main Vac valve opened
12/29/2010	10:25:47 AM	Bypass valve opened
12/29/2010	10:25:47 AM	Helium MFC set to  100.000000
12/29/2010	10:25:47 AM	H2 MFC set to  0.000000
12/29/2010	10:25:47 AM	BCl3 MFC set to  0.000000
12/29/2010	10:25:47 AM	PHl3 MFC set to  0.000000
12/29/2010	10:25:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:25:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:25:47 AM	Tube furnace set to 0
12/29/2010	10:26:47 AM	Helium valve closed
12/29/2010	10:26:47 AM	H2 valve closed
12/29/2010	10:26:47 AM	BCl3 valve closed
12/29/2010	10:26:47 AM	PH3 valve closed
12/29/2010	10:26:47 AM	SiCl4 pre valve closed
12/29/2010	10:26:47 AM	SiCl4 post valve closed
12/29/2010	10:26:47 AM	Bubbler valve closed
12/29/2010	10:26:47 AM	Main Vac valve opened
12/29/2010	10:26:47 AM	Bypass valve opened
12/29/2010	10:26:47 AM	Helium MFC set to  0.000000
12/29/2010	10:26:47 AM	H2 MFC set to  0.000000
12/29/2010	10:26:47 AM	BCl3 MFC set to  0.000000
12/29/2010	10:26:47 AM	PHl3 MFC set to  0.000000
12/29/2010	10:26:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:26:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:26:47 AM	Tube furnace set to 0
12/29/2010	10:27:47 AM	H2 valve closed
12/29/2010	10:27:47 AM	BCl3 valve closed
12/29/2010	10:27:47 AM	PH3 valve closed
12/29/2010	10:27:47 AM	SiCl4 pre valve closed
12/29/2010	10:27:47 AM	SiCl4 post valve closed
12/29/2010	10:27:47 AM	Bubbler valve closed
12/29/2010	10:27:47 AM	Helium valve opened
12/29/2010	10:27:47 AM	Main Vac valve opened
12/29/2010	10:27:47 AM	Bypass valve opened
12/29/2010	10:27:47 AM	Helium MFC set to  100.000000
12/29/2010	10:27:47 AM	H2 MFC set to  0.000000
12/29/2010	10:27:47 AM	BCl3 MFC set to  0.000000
12/29/2010	10:27:47 AM	PHl3 MFC set to  0.000000
12/29/2010	10:27:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:27:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:27:47 AM	Tube furnace set to 0
12/29/2010	10:28:47 AM	Helium valve closed
12/29/2010	10:28:47 AM	H2 valve closed
12/29/2010	10:28:47 AM	BCl3 valve closed
12/29/2010	10:28:47 AM	PH3 valve closed
12/29/2010	10:28:47 AM	SiCl4 pre valve closed
12/29/2010	10:28:47 AM	SiCl4 post valve closed
12/29/2010	10:28:47 AM	Bubbler valve closed
12/29/2010	10:28:47 AM	Main Vac valve opened
12/29/2010	10:28:47 AM	Bypass valve opened
12/29/2010	10:28:47 AM	Helium MFC set to  0.000000
12/29/2010	10:28:47 AM	H2 MFC set to  0.000000
12/29/2010	10:28:47 AM	BCl3 MFC set to  0.000000
12/29/2010	10:28:47 AM	PHl3 MFC set to  0.000000
12/29/2010	10:28:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:28:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:28:47 AM	Tube furnace set to 0
12/29/2010	10:29:47 AM	H2 valve closed
12/29/2010	10:29:47 AM	BCl3 valve closed
12/29/2010	10:29:47 AM	PH3 valve closed
12/29/2010	10:29:47 AM	SiCl4 pre valve closed
12/29/2010	10:29:47 AM	SiCl4 post valve closed
12/29/2010	10:29:47 AM	Bubbler valve closed
12/29/2010	10:29:47 AM	Helium valve opened
12/29/2010	10:29:47 AM	Main Vac valve opened
12/29/2010	10:29:47 AM	Bypass valve opened
12/29/2010	10:29:47 AM	Helium MFC set to  100.000000
12/29/2010	10:29:47 AM	H2 MFC set to  0.000000
12/29/2010	10:29:47 AM	BCl3 MFC set to  0.000000
12/29/2010	10:29:47 AM	PHl3 MFC set to  0.000000
12/29/2010	10:29:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:29:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:29:48 AM	Tube furnace set to 0
12/29/2010	10:30:48 AM	Helium valve closed
12/29/2010	10:30:48 AM	H2 valve closed
12/29/2010	10:30:48 AM	BCl3 valve closed
12/29/2010	10:30:48 AM	PH3 valve closed
12/29/2010	10:30:48 AM	SiCl4 pre valve closed
12/29/2010	10:30:48 AM	SiCl4 post valve closed
12/29/2010	10:30:48 AM	Bubbler valve closed
12/29/2010	10:30:48 AM	Main Vac valve opened
12/29/2010	10:30:48 AM	Bypass valve opened
12/29/2010	10:30:48 AM	Helium MFC set to  0.000000
12/29/2010	10:30:48 AM	H2 MFC set to  0.000000
12/29/2010	10:30:48 AM	BCl3 MFC set to  0.000000
12/29/2010	10:30:48 AM	PHl3 MFC set to  0.000000
12/29/2010	10:30:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:30:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:30:48 AM	Tube furnace set to 0
12/29/2010	10:31:48 AM	H2 valve closed
12/29/2010	10:31:48 AM	BCl3 valve closed
12/29/2010	10:31:48 AM	PH3 valve closed
12/29/2010	10:31:48 AM	SiCl4 pre valve closed
12/29/2010	10:31:48 AM	SiCl4 post valve closed
12/29/2010	10:31:48 AM	Bubbler valve closed
12/29/2010	10:31:48 AM	Helium valve opened
12/29/2010	10:31:48 AM	Main Vac valve opened
12/29/2010	10:31:48 AM	Bypass valve opened
12/29/2010	10:31:48 AM	Helium MFC set to  100.000000
12/29/2010	10:31:48 AM	H2 MFC set to  0.000000
12/29/2010	10:31:48 AM	BCl3 MFC set to  0.000000
12/29/2010	10:31:48 AM	PHl3 MFC set to  0.000000
12/29/2010	10:31:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:31:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:31:48 AM	Tube furnace set to 0
12/29/2010	10:32:48 AM	Helium valve closed
12/29/2010	10:32:48 AM	H2 valve closed
12/29/2010	10:32:48 AM	BCl3 valve closed
12/29/2010	10:32:48 AM	PH3 valve closed
12/29/2010	10:32:48 AM	SiCl4 pre valve closed
12/29/2010	10:32:48 AM	SiCl4 post valve closed
12/29/2010	10:32:48 AM	Bubbler valve closed
12/29/2010	10:32:48 AM	Main Vac valve opened
12/29/2010	10:32:48 AM	Bypass valve opened
12/29/2010	10:32:48 AM	Helium MFC set to  0.000000
12/29/2010	10:32:48 AM	H2 MFC set to  0.000000
12/29/2010	10:32:48 AM	BCl3 MFC set to  0.000000
12/29/2010	10:32:48 AM	PHl3 MFC set to  0.000000
12/29/2010	10:32:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:32:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:32:48 AM	Tube furnace set to 0
12/29/2010	10:33:48 AM	H2 valve closed
12/29/2010	10:33:48 AM	BCl3 valve closed
12/29/2010	10:33:48 AM	PH3 valve closed
12/29/2010	10:33:48 AM	SiCl4 pre valve closed
12/29/2010	10:33:48 AM	SiCl4 post valve closed
12/29/2010	10:33:48 AM	Bubbler valve closed
12/29/2010	10:33:48 AM	Helium valve opened
12/29/2010	10:33:48 AM	Main Vac valve opened
12/29/2010	10:33:48 AM	Bypass valve opened
12/29/2010	10:33:48 AM	Helium MFC set to  100.000000
12/29/2010	10:33:48 AM	H2 MFC set to  0.000000
12/29/2010	10:33:48 AM	BCl3 MFC set to  0.000000
12/29/2010	10:33:48 AM	PHl3 MFC set to  0.000000
12/29/2010	10:33:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:33:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:33:48 AM	Tube furnace set to 0
12/29/2010	10:34:48 AM	Helium valve closed
12/29/2010	10:34:48 AM	H2 valve closed
12/29/2010	10:34:48 AM	BCl3 valve closed
12/29/2010	10:34:48 AM	PH3 valve closed
12/29/2010	10:34:48 AM	SiCl4 pre valve closed
12/29/2010	10:34:48 AM	SiCl4 post valve closed
12/29/2010	10:34:48 AM	Bubbler valve closed
12/29/2010	10:34:48 AM	Main Vac valve opened
12/29/2010	10:34:48 AM	Bypass valve opened
12/29/2010	10:34:48 AM	Helium MFC set to  0.000000
12/29/2010	10:34:48 AM	H2 MFC set to  0.000000
12/29/2010	10:34:48 AM	BCl3 MFC set to  0.000000
12/29/2010	10:34:48 AM	PHl3 MFC set to  0.000000
12/29/2010	10:34:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:34:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:34:49 AM	Tube furnace set to 0
12/29/2010	10:35:49 AM	H2 valve closed
12/29/2010	10:35:49 AM	BCl3 valve closed
12/29/2010	10:35:49 AM	PH3 valve closed
12/29/2010	10:35:49 AM	SiCl4 pre valve closed
12/29/2010	10:35:49 AM	SiCl4 post valve closed
12/29/2010	10:35:49 AM	Bubbler valve closed
12/29/2010	10:35:49 AM	Helium valve opened
12/29/2010	10:35:49 AM	Main Vac valve opened
12/29/2010	10:35:49 AM	Bypass valve opened
12/29/2010	10:35:49 AM	Helium MFC set to  100.000000
12/29/2010	10:35:49 AM	H2 MFC set to  0.000000
12/29/2010	10:35:49 AM	BCl3 MFC set to  0.000000
12/29/2010	10:35:49 AM	PHl3 MFC set to  0.000000
12/29/2010	10:35:49 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:35:49 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:35:49 AM	Tube furnace set to 0
12/29/2010	10:36:49 AM	Helium valve closed
12/29/2010	10:36:49 AM	H2 valve closed
12/29/2010	10:36:49 AM	BCl3 valve closed
12/29/2010	10:36:49 AM	PH3 valve closed
12/29/2010	10:36:49 AM	SiCl4 pre valve closed
12/29/2010	10:36:49 AM	SiCl4 post valve closed
12/29/2010	10:36:49 AM	Bubbler valve closed
12/29/2010	10:36:49 AM	Main Vac valve opened
12/29/2010	10:36:49 AM	Bypass valve opened
12/29/2010	10:36:49 AM	Helium MFC set to  0.000000
12/29/2010	10:36:49 AM	H2 MFC set to  0.000000
12/29/2010	10:36:49 AM	BCl3 MFC set to  0.000000
12/29/2010	10:36:49 AM	PHl3 MFC set to  0.000000
12/29/2010	10:36:49 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:36:49 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:36:49 AM	Tube furnace set to 0
12/29/2010	10:36:50 AM	Run finished at 10:36 AM
12/29/2010	10:36:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	10:53:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	10:53:49 AM	Recipe started at 10:53 AM
12/29/2010	10:53:49 AM	Helium valve closed
12/29/2010	10:53:49 AM	H2 valve closed
12/29/2010	10:53:49 AM	BCl3 valve closed
12/29/2010	10:53:49 AM	PH3 valve closed
12/29/2010	10:53:49 AM	SiCl4 pre valve closed
12/29/2010	10:53:49 AM	SiCl4 post valve closed
12/29/2010	10:53:49 AM	Main Vac valve closed
12/29/2010	10:53:49 AM	Bypass valve closed
12/29/2010	10:53:49 AM	Bubbler valve closed
12/29/2010	10:53:49 AM	Helium MFC set to  0.000000
12/29/2010	10:53:49 AM	H2 MFC set to  0.000000
12/29/2010	10:53:49 AM	BCl3 MFC set to  0.000000
12/29/2010	10:53:49 AM	PHl3 MFC set to  0.000000
12/29/2010	10:53:49 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:53:49 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:53:49 AM	Tube furnace set to 0
12/29/2010	10:53:49 AM	Run finished at 10:53 AM
12/29/2010	10:53:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	10:54:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	10:54:43 AM	Recipe started at 10:54 AM
12/29/2010	10:54:43 AM	Helium valve closed
12/29/2010	10:54:43 AM	H2 valve closed
12/29/2010	10:54:43 AM	BCl3 valve closed
12/29/2010	10:54:43 AM	PH3 valve closed
12/29/2010	10:54:43 AM	SiCl4 pre valve closed
12/29/2010	10:54:43 AM	SiCl4 post valve closed
12/29/2010	10:54:43 AM	Main Vac valve closed
12/29/2010	10:54:43 AM	Bubbler valve closed
12/29/2010	10:54:43 AM	Bypass valve opened
12/29/2010	10:54:43 AM	Helium MFC set to  0.000000
12/29/2010	10:54:43 AM	H2 MFC set to  0.000000
12/29/2010	10:54:43 AM	BCl3 MFC set to  0.000000
12/29/2010	10:54:43 AM	PHl3 MFC set to  0.000000
12/29/2010	10:54:43 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:54:43 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:54:43 AM	Tube furnace set to 0
12/29/2010	10:54:44 AM	Helium valve closed
12/29/2010	10:54:44 AM	H2 valve closed
12/29/2010	10:54:44 AM	BCl3 valve closed
12/29/2010	10:54:44 AM	PH3 valve closed
12/29/2010	10:54:44 AM	SiCl4 pre valve closed
12/29/2010	10:54:44 AM	SiCl4 post valve closed
12/29/2010	10:54:44 AM	Bubbler valve closed
12/29/2010	10:54:44 AM	Main Vac valve opened
12/29/2010	10:54:44 AM	Bypass valve opened
12/29/2010	10:54:44 AM	Helium MFC set to  0.000000
12/29/2010	10:54:44 AM	H2 MFC set to  0.000000
12/29/2010	10:54:44 AM	BCl3 MFC set to  0.000000
12/29/2010	10:54:44 AM	PHl3 MFC set to  0.000000
12/29/2010	10:54:44 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:54:44 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:54:44 AM	Tube furnace set to 0
12/29/2010	10:55:44 AM	H2 valve closed
12/29/2010	10:55:44 AM	BCl3 valve closed
12/29/2010	10:55:44 AM	PH3 valve closed
12/29/2010	10:55:44 AM	SiCl4 pre valve closed
12/29/2010	10:55:44 AM	SiCl4 post valve closed
12/29/2010	10:55:44 AM	Bubbler valve closed
12/29/2010	10:55:44 AM	Helium valve opened
12/29/2010	10:55:44 AM	Main Vac valve opened
12/29/2010	10:55:44 AM	Bypass valve opened
12/29/2010	10:55:44 AM	Helium MFC set to  100.000000
12/29/2010	10:55:44 AM	H2 MFC set to  0.000000
12/29/2010	10:55:44 AM	BCl3 MFC set to  0.000000
12/29/2010	10:55:44 AM	PHl3 MFC set to  0.000000
12/29/2010	10:55:44 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:55:44 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:55:44 AM	Tube furnace set to 0
12/29/2010	10:56:44 AM	Helium valve closed
12/29/2010	10:56:44 AM	H2 valve closed
12/29/2010	10:56:44 AM	BCl3 valve closed
12/29/2010	10:56:44 AM	PH3 valve closed
12/29/2010	10:56:44 AM	SiCl4 pre valve closed
12/29/2010	10:56:44 AM	SiCl4 post valve closed
12/29/2010	10:56:44 AM	Bubbler valve closed
12/29/2010	10:56:44 AM	Main Vac valve opened
12/29/2010	10:56:44 AM	Bypass valve opened
12/29/2010	10:56:44 AM	Helium MFC set to  0.000000
12/29/2010	10:56:44 AM	H2 MFC set to  0.000000
12/29/2010	10:56:44 AM	BCl3 MFC set to  0.000000
12/29/2010	10:56:44 AM	PHl3 MFC set to  0.000000
12/29/2010	10:56:44 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:56:44 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:56:44 AM	Tube furnace set to 0
12/29/2010	10:57:44 AM	H2 valve closed
12/29/2010	10:57:44 AM	BCl3 valve closed
12/29/2010	10:57:44 AM	PH3 valve closed
12/29/2010	10:57:44 AM	SiCl4 pre valve closed
12/29/2010	10:57:44 AM	SiCl4 post valve closed
12/29/2010	10:57:44 AM	Bubbler valve closed
12/29/2010	10:57:44 AM	Helium valve opened
12/29/2010	10:57:44 AM	Main Vac valve opened
12/29/2010	10:57:44 AM	Bypass valve opened
12/29/2010	10:57:44 AM	Helium MFC set to  100.000000
12/29/2010	10:57:44 AM	H2 MFC set to  0.000000
12/29/2010	10:57:44 AM	BCl3 MFC set to  0.000000
12/29/2010	10:57:44 AM	PHl3 MFC set to  0.000000
12/29/2010	10:57:44 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:57:44 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:57:44 AM	Tube furnace set to 0
12/29/2010	10:58:45 AM	Helium valve closed
12/29/2010	10:58:45 AM	H2 valve closed
12/29/2010	10:58:45 AM	BCl3 valve closed
12/29/2010	10:58:45 AM	PH3 valve closed
12/29/2010	10:58:45 AM	SiCl4 pre valve closed
12/29/2010	10:58:45 AM	SiCl4 post valve closed
12/29/2010	10:58:45 AM	Bubbler valve closed
12/29/2010	10:58:45 AM	Main Vac valve opened
12/29/2010	10:58:45 AM	Bypass valve opened
12/29/2010	10:58:45 AM	Helium MFC set to  0.000000
12/29/2010	10:58:45 AM	H2 MFC set to  0.000000
12/29/2010	10:58:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:58:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:58:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:58:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:58:45 AM	Tube furnace set to 0
12/29/2010	10:59:45 AM	H2 valve closed
12/29/2010	10:59:45 AM	BCl3 valve closed
12/29/2010	10:59:45 AM	PH3 valve closed
12/29/2010	10:59:45 AM	SiCl4 pre valve closed
12/29/2010	10:59:45 AM	SiCl4 post valve closed
12/29/2010	10:59:45 AM	Bubbler valve closed
12/29/2010	10:59:45 AM	Helium valve opened
12/29/2010	10:59:45 AM	Main Vac valve opened
12/29/2010	10:59:45 AM	Bypass valve opened
12/29/2010	10:59:45 AM	Helium MFC set to  100.000000
12/29/2010	10:59:45 AM	H2 MFC set to  0.000000
12/29/2010	10:59:45 AM	BCl3 MFC set to  0.000000
12/29/2010	10:59:45 AM	PHl3 MFC set to  0.000000
12/29/2010	10:59:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	10:59:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	10:59:45 AM	Tube furnace set to 0
12/29/2010	11:00:45 AM	Helium valve closed
12/29/2010	11:00:45 AM	H2 valve closed
12/29/2010	11:00:45 AM	BCl3 valve closed
12/29/2010	11:00:45 AM	PH3 valve closed
12/29/2010	11:00:45 AM	SiCl4 pre valve closed
12/29/2010	11:00:45 AM	SiCl4 post valve closed
12/29/2010	11:00:45 AM	Bubbler valve closed
12/29/2010	11:00:45 AM	Main Vac valve opened
12/29/2010	11:00:45 AM	Bypass valve opened
12/29/2010	11:00:45 AM	Helium MFC set to  0.000000
12/29/2010	11:00:45 AM	H2 MFC set to  0.000000
12/29/2010	11:00:45 AM	BCl3 MFC set to  0.000000
12/29/2010	11:00:45 AM	PHl3 MFC set to  0.000000
12/29/2010	11:00:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:00:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:00:45 AM	Tube furnace set to 0
12/29/2010	11:01:45 AM	H2 valve closed
12/29/2010	11:01:45 AM	BCl3 valve closed
12/29/2010	11:01:45 AM	PH3 valve closed
12/29/2010	11:01:45 AM	SiCl4 pre valve closed
12/29/2010	11:01:45 AM	SiCl4 post valve closed
12/29/2010	11:01:45 AM	Bubbler valve closed
12/29/2010	11:01:45 AM	Helium valve opened
12/29/2010	11:01:45 AM	Main Vac valve opened
12/29/2010	11:01:45 AM	Bypass valve opened
12/29/2010	11:01:45 AM	Helium MFC set to  100.000000
12/29/2010	11:01:45 AM	H2 MFC set to  0.000000
12/29/2010	11:01:45 AM	BCl3 MFC set to  0.000000
12/29/2010	11:01:45 AM	PHl3 MFC set to  0.000000
12/29/2010	11:01:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:01:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:01:45 AM	Tube furnace set to 0
12/29/2010	11:02:45 AM	Helium valve closed
12/29/2010	11:02:45 AM	H2 valve closed
12/29/2010	11:02:45 AM	BCl3 valve closed
12/29/2010	11:02:45 AM	PH3 valve closed
12/29/2010	11:02:45 AM	SiCl4 pre valve closed
12/29/2010	11:02:45 AM	SiCl4 post valve closed
12/29/2010	11:02:45 AM	Bubbler valve closed
12/29/2010	11:02:45 AM	Main Vac valve opened
12/29/2010	11:02:45 AM	Bypass valve opened
12/29/2010	11:02:45 AM	Helium MFC set to  0.000000
12/29/2010	11:02:45 AM	H2 MFC set to  0.000000
12/29/2010	11:02:45 AM	BCl3 MFC set to  0.000000
12/29/2010	11:02:45 AM	PHl3 MFC set to  0.000000
12/29/2010	11:02:45 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:02:45 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:02:46 AM	Tube furnace set to 0
12/29/2010	11:03:46 AM	H2 valve closed
12/29/2010	11:03:46 AM	BCl3 valve closed
12/29/2010	11:03:46 AM	PH3 valve closed
12/29/2010	11:03:46 AM	SiCl4 pre valve closed
12/29/2010	11:03:46 AM	SiCl4 post valve closed
12/29/2010	11:03:46 AM	Bubbler valve closed
12/29/2010	11:03:46 AM	Helium valve opened
12/29/2010	11:03:46 AM	Main Vac valve opened
12/29/2010	11:03:46 AM	Bypass valve opened
12/29/2010	11:03:46 AM	Helium MFC set to  100.000000
12/29/2010	11:03:46 AM	H2 MFC set to  0.000000
12/29/2010	11:03:46 AM	BCl3 MFC set to  0.000000
12/29/2010	11:03:46 AM	PHl3 MFC set to  0.000000
12/29/2010	11:03:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:03:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:03:46 AM	Tube furnace set to 0
12/29/2010	11:04:46 AM	Helium valve closed
12/29/2010	11:04:46 AM	H2 valve closed
12/29/2010	11:04:46 AM	BCl3 valve closed
12/29/2010	11:04:46 AM	PH3 valve closed
12/29/2010	11:04:46 AM	SiCl4 pre valve closed
12/29/2010	11:04:46 AM	SiCl4 post valve closed
12/29/2010	11:04:46 AM	Bubbler valve closed
12/29/2010	11:04:46 AM	Main Vac valve opened
12/29/2010	11:04:46 AM	Bypass valve opened
12/29/2010	11:04:46 AM	Helium MFC set to  0.000000
12/29/2010	11:04:46 AM	H2 MFC set to  0.000000
12/29/2010	11:04:46 AM	BCl3 MFC set to  0.000000
12/29/2010	11:04:46 AM	PHl3 MFC set to  0.000000
12/29/2010	11:04:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:04:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:04:46 AM	Tube furnace set to 0
12/29/2010	11:05:46 AM	H2 valve closed
12/29/2010	11:05:46 AM	BCl3 valve closed
12/29/2010	11:05:46 AM	PH3 valve closed
12/29/2010	11:05:46 AM	SiCl4 pre valve closed
12/29/2010	11:05:46 AM	SiCl4 post valve closed
12/29/2010	11:05:46 AM	Bubbler valve closed
12/29/2010	11:05:46 AM	Helium valve opened
12/29/2010	11:05:46 AM	Main Vac valve opened
12/29/2010	11:05:46 AM	Bypass valve opened
12/29/2010	11:05:46 AM	Helium MFC set to  100.000000
12/29/2010	11:05:46 AM	H2 MFC set to  0.000000
12/29/2010	11:05:46 AM	BCl3 MFC set to  0.000000
12/29/2010	11:05:46 AM	PHl3 MFC set to  0.000000
12/29/2010	11:05:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:05:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:05:46 AM	Tube furnace set to 0
12/29/2010	11:06:46 AM	Helium valve closed
12/29/2010	11:06:46 AM	H2 valve closed
12/29/2010	11:06:46 AM	BCl3 valve closed
12/29/2010	11:06:46 AM	PH3 valve closed
12/29/2010	11:06:46 AM	SiCl4 pre valve closed
12/29/2010	11:06:46 AM	SiCl4 post valve closed
12/29/2010	11:06:46 AM	Bubbler valve closed
12/29/2010	11:06:46 AM	Main Vac valve opened
12/29/2010	11:06:46 AM	Bypass valve opened
12/29/2010	11:06:46 AM	Helium MFC set to  0.000000
12/29/2010	11:06:46 AM	H2 MFC set to  0.000000
12/29/2010	11:06:46 AM	BCl3 MFC set to  0.000000
12/29/2010	11:06:46 AM	PHl3 MFC set to  0.000000
12/29/2010	11:06:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:06:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:06:46 AM	Tube furnace set to 0
12/29/2010	11:07:46 AM	H2 valve closed
12/29/2010	11:07:46 AM	BCl3 valve closed
12/29/2010	11:07:46 AM	PH3 valve closed
12/29/2010	11:07:46 AM	SiCl4 pre valve closed
12/29/2010	11:07:46 AM	SiCl4 post valve closed
12/29/2010	11:07:46 AM	Bubbler valve closed
12/29/2010	11:07:46 AM	Helium valve opened
12/29/2010	11:07:46 AM	Main Vac valve opened
12/29/2010	11:07:46 AM	Bypass valve opened
12/29/2010	11:07:46 AM	Helium MFC set to  100.000000
12/29/2010	11:07:46 AM	H2 MFC set to  0.000000
12/29/2010	11:07:46 AM	BCl3 MFC set to  0.000000
12/29/2010	11:07:46 AM	PHl3 MFC set to  0.000000
12/29/2010	11:07:46 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:07:46 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:07:47 AM	Tube furnace set to 0
12/29/2010	11:08:47 AM	Helium valve closed
12/29/2010	11:08:47 AM	H2 valve closed
12/29/2010	11:08:47 AM	BCl3 valve closed
12/29/2010	11:08:47 AM	PH3 valve closed
12/29/2010	11:08:47 AM	SiCl4 pre valve closed
12/29/2010	11:08:47 AM	SiCl4 post valve closed
12/29/2010	11:08:47 AM	Bubbler valve closed
12/29/2010	11:08:47 AM	Main Vac valve opened
12/29/2010	11:08:47 AM	Bypass valve opened
12/29/2010	11:08:47 AM	Helium MFC set to  0.000000
12/29/2010	11:08:47 AM	H2 MFC set to  0.000000
12/29/2010	11:08:47 AM	BCl3 MFC set to  0.000000
12/29/2010	11:08:47 AM	PHl3 MFC set to  0.000000
12/29/2010	11:08:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:08:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:08:47 AM	Tube furnace set to 0
12/29/2010	11:09:47 AM	H2 valve closed
12/29/2010	11:09:47 AM	BCl3 valve closed
12/29/2010	11:09:47 AM	PH3 valve closed
12/29/2010	11:09:47 AM	SiCl4 pre valve closed
12/29/2010	11:09:47 AM	SiCl4 post valve closed
12/29/2010	11:09:47 AM	Bubbler valve closed
12/29/2010	11:09:47 AM	Helium valve opened
12/29/2010	11:09:47 AM	Main Vac valve opened
12/29/2010	11:09:47 AM	Bypass valve opened
12/29/2010	11:09:47 AM	Helium MFC set to  100.000000
12/29/2010	11:09:47 AM	H2 MFC set to  0.000000
12/29/2010	11:09:47 AM	BCl3 MFC set to  0.000000
12/29/2010	11:09:47 AM	PHl3 MFC set to  0.000000
12/29/2010	11:09:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:09:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:09:47 AM	Tube furnace set to 0
12/29/2010	11:10:47 AM	Helium valve closed
12/29/2010	11:10:47 AM	H2 valve closed
12/29/2010	11:10:47 AM	BCl3 valve closed
12/29/2010	11:10:47 AM	PH3 valve closed
12/29/2010	11:10:47 AM	SiCl4 pre valve closed
12/29/2010	11:10:47 AM	SiCl4 post valve closed
12/29/2010	11:10:47 AM	Bubbler valve closed
12/29/2010	11:10:47 AM	Main Vac valve opened
12/29/2010	11:10:47 AM	Bypass valve opened
12/29/2010	11:10:47 AM	Helium MFC set to  0.000000
12/29/2010	11:10:47 AM	H2 MFC set to  0.000000
12/29/2010	11:10:47 AM	BCl3 MFC set to  0.000000
12/29/2010	11:10:47 AM	PHl3 MFC set to  0.000000
12/29/2010	11:10:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:10:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:10:47 AM	Tube furnace set to 0
12/29/2010	11:11:47 AM	H2 valve closed
12/29/2010	11:11:47 AM	BCl3 valve closed
12/29/2010	11:11:47 AM	PH3 valve closed
12/29/2010	11:11:47 AM	SiCl4 pre valve closed
12/29/2010	11:11:47 AM	SiCl4 post valve closed
12/29/2010	11:11:47 AM	Bubbler valve closed
12/29/2010	11:11:47 AM	Helium valve opened
12/29/2010	11:11:47 AM	Main Vac valve opened
12/29/2010	11:11:47 AM	Bypass valve opened
12/29/2010	11:11:47 AM	Helium MFC set to  100.000000
12/29/2010	11:11:47 AM	H2 MFC set to  0.000000
12/29/2010	11:11:47 AM	BCl3 MFC set to  0.000000
12/29/2010	11:11:47 AM	PHl3 MFC set to  0.000000
12/29/2010	11:11:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:11:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:11:47 AM	Tube furnace set to 0
12/29/2010	11:12:47 AM	Helium valve closed
12/29/2010	11:12:47 AM	H2 valve closed
12/29/2010	11:12:47 AM	BCl3 valve closed
12/29/2010	11:12:47 AM	PH3 valve closed
12/29/2010	11:12:47 AM	SiCl4 pre valve closed
12/29/2010	11:12:47 AM	SiCl4 post valve closed
12/29/2010	11:12:47 AM	Bubbler valve closed
12/29/2010	11:12:47 AM	Main Vac valve opened
12/29/2010	11:12:47 AM	Bypass valve opened
12/29/2010	11:12:47 AM	Helium MFC set to  0.000000
12/29/2010	11:12:47 AM	H2 MFC set to  0.000000
12/29/2010	11:12:47 AM	BCl3 MFC set to  0.000000
12/29/2010	11:12:47 AM	PHl3 MFC set to  0.000000
12/29/2010	11:12:47 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:12:47 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:12:48 AM	Tube furnace set to 0
12/29/2010	11:13:48 AM	H2 valve closed
12/29/2010	11:13:48 AM	BCl3 valve closed
12/29/2010	11:13:48 AM	PH3 valve closed
12/29/2010	11:13:48 AM	SiCl4 pre valve closed
12/29/2010	11:13:48 AM	SiCl4 post valve closed
12/29/2010	11:13:48 AM	Bubbler valve closed
12/29/2010	11:13:48 AM	Helium valve opened
12/29/2010	11:13:48 AM	Main Vac valve opened
12/29/2010	11:13:48 AM	Bypass valve opened
12/29/2010	11:13:48 AM	Helium MFC set to  100.000000
12/29/2010	11:13:48 AM	H2 MFC set to  0.000000
12/29/2010	11:13:48 AM	BCl3 MFC set to  0.000000
12/29/2010	11:13:48 AM	PHl3 MFC set to  0.000000
12/29/2010	11:13:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:13:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:13:48 AM	Tube furnace set to 0
12/29/2010	11:14:48 AM	Helium valve closed
12/29/2010	11:14:48 AM	H2 valve closed
12/29/2010	11:14:48 AM	BCl3 valve closed
12/29/2010	11:14:48 AM	PH3 valve closed
12/29/2010	11:14:48 AM	SiCl4 pre valve closed
12/29/2010	11:14:48 AM	SiCl4 post valve closed
12/29/2010	11:14:48 AM	Bubbler valve closed
12/29/2010	11:14:48 AM	Main Vac valve opened
12/29/2010	11:14:48 AM	Bypass valve opened
12/29/2010	11:14:48 AM	Helium MFC set to  0.000000
12/29/2010	11:14:48 AM	H2 MFC set to  0.000000
12/29/2010	11:14:48 AM	BCl3 MFC set to  0.000000
12/29/2010	11:14:48 AM	PHl3 MFC set to  0.000000
12/29/2010	11:14:48 AM	SiCl4 MFC set to  0.000000
12/29/2010	11:14:48 AM	Bypass solenoid MFC set to  0.000000
12/29/2010	11:14:48 AM	Tube furnace set to 0
12/29/2010	11:14:49 AM	Run finished at 11:14 AM
12/29/2010	11:14:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	12:46:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	12:46:00 PM	Recipe started at 12:46 PM
12/29/2010	12:46:01 PM	Helium valve closed
12/29/2010	12:46:01 PM	H2 valve closed
12/29/2010	12:46:01 PM	BCl3 valve closed
12/29/2010	12:46:01 PM	PH3 valve closed
12/29/2010	12:46:01 PM	SiCl4 pre valve closed
12/29/2010	12:46:01 PM	SiCl4 post valve closed
12/29/2010	12:46:01 PM	Main Vac valve closed
12/29/2010	12:46:01 PM	Bypass valve closed
12/29/2010	12:46:01 PM	Bubbler valve closed
12/29/2010	12:46:01 PM	Helium MFC set to  0.000000
12/29/2010	12:46:01 PM	H2 MFC set to  0.000000
12/29/2010	12:46:01 PM	BCl3 MFC set to  0.000000
12/29/2010	12:46:01 PM	PHl3 MFC set to  0.000000
12/29/2010	12:46:01 PM	SiCl4 MFC set to  0.000000
12/29/2010	12:46:01 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	12:46:01 PM	Tube furnace set to 0
12/29/2010	12:46:01 PM	Run finished at 12:46 PM
12/29/2010	12:46:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	12:46:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	12:46:33 PM	Recipe started at 12:46 PM
12/29/2010	12:46:33 PM	Helium valve closed
12/29/2010	12:46:33 PM	H2 valve closed
12/29/2010	12:46:33 PM	BCl3 valve closed
12/29/2010	12:46:33 PM	PH3 valve closed
12/29/2010	12:46:33 PM	SiCl4 pre valve closed
12/29/2010	12:46:33 PM	SiCl4 post valve closed
12/29/2010	12:46:33 PM	Main Vac valve closed
12/29/2010	12:46:33 PM	Bubbler valve closed
12/29/2010	12:46:33 PM	Bypass valve opened
12/29/2010	12:46:33 PM	Helium MFC set to  0.000000
12/29/2010	12:46:33 PM	H2 MFC set to  0.000000
12/29/2010	12:46:33 PM	BCl3 MFC set to  0.000000
12/29/2010	12:46:33 PM	PHl3 MFC set to  0.000000
12/29/2010	12:46:33 PM	SiCl4 MFC set to  0.000000
12/29/2010	12:46:33 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	12:46:33 PM	Tube furnace set to 0
12/29/2010	12:46:33 PM	Helium valve closed
12/29/2010	12:46:33 PM	H2 valve closed
12/29/2010	12:46:33 PM	BCl3 valve closed
12/29/2010	12:46:33 PM	PH3 valve closed
12/29/2010	12:46:33 PM	SiCl4 pre valve closed
12/29/2010	12:46:33 PM	SiCl4 post valve closed
12/29/2010	12:46:33 PM	Bubbler valve closed
12/29/2010	12:46:33 PM	Main Vac valve opened
12/29/2010	12:46:33 PM	Bypass valve opened
12/29/2010	12:46:33 PM	Helium MFC set to  0.000000
12/29/2010	12:46:33 PM	H2 MFC set to  0.000000
12/29/2010	12:46:33 PM	BCl3 MFC set to  0.000000
12/29/2010	12:46:33 PM	PHl3 MFC set to  0.000000
12/29/2010	12:46:33 PM	SiCl4 MFC set to  0.000000
12/29/2010	12:46:33 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	12:46:33 PM	Tube furnace set to 0
12/29/2010	12:46:34 PM	Run finished at 12:46 PM
12/29/2010	12:46:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	12:47:50 PM	Recipe started at 12:47 PM
12/29/2010	12:47:50 PM	Helium valve closed
12/29/2010	12:47:50 PM	BCl3 valve closed
12/29/2010	12:47:50 PM	PH3 valve closed
12/29/2010	12:47:50 PM	SiCl4 pre valve closed
12/29/2010	12:47:50 PM	SiCl4 post valve closed
12/29/2010	12:47:50 PM	Main Vac valve closed
12/29/2010	12:47:50 PM	Bypass valve closed
12/29/2010	12:47:50 PM	Bubbler valve closed
12/29/2010	12:47:50 PM	H2 valve opened
12/29/2010	12:47:50 PM	Helium MFC set to  0.000000
12/29/2010	12:47:50 PM	H2 MFC set to  500.000000
12/29/2010	12:47:50 PM	BCl3 MFC set to  0.000000
12/29/2010	12:47:50 PM	PHl3 MFC set to  0.000000
12/29/2010	12:47:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	12:47:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	12:47:50 PM	Tube furnace set to 100
12/29/2010	12:49:12 PM	Helium valve closed
12/29/2010	12:49:12 PM	BCl3 valve closed
12/29/2010	12:49:12 PM	PH3 valve closed
12/29/2010	12:49:12 PM	SiCl4 pre valve closed
12/29/2010	12:49:12 PM	SiCl4 post valve closed
12/29/2010	12:49:12 PM	Main Vac valve closed
12/29/2010	12:49:12 PM	Bypass valve closed
12/29/2010	12:49:12 PM	H2 valve opened
12/29/2010	12:49:12 PM	Bubbler valve opened
12/29/2010	12:49:12 PM	Helium MFC set to  0.000000
12/29/2010	12:49:12 PM	H2 MFC set to  500.000000
12/29/2010	12:49:12 PM	BCl3 MFC set to  0.000000
12/29/2010	12:49:12 PM	PHl3 MFC set to  0.000000
12/29/2010	12:49:12 PM	SiCl4 MFC set to  0.000000
12/29/2010	12:49:12 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	12:49:13 PM	Tube furnace set to 1000
12/29/2010	1:09:13 PM	Helium valve closed
12/29/2010	1:09:13 PM	PH3 valve closed
12/29/2010	1:09:13 PM	Main Vac valve closed
12/29/2010	1:09:13 PM	Bypass valve closed
12/29/2010	1:09:13 PM	H2 valve opened
12/29/2010	1:09:13 PM	BCl3 valve opened
12/29/2010	1:09:13 PM	SiCl4 pre valve opened
12/29/2010	1:09:13 PM	SiCl4 post valve opened
12/29/2010	1:09:13 PM	Bubbler valve opened
12/29/2010	1:09:13 PM	Helium MFC set to  0.000000
12/29/2010	1:09:13 PM	H2 MFC set to  500.000000
12/29/2010	1:09:13 PM	BCl3 MFC set to  3.000000
12/29/2010	1:09:13 PM	PHl3 MFC set to  0.000000
12/29/2010	1:09:13 PM	SiCl4 MFC set to  50.000000
12/29/2010	1:09:13 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	1:09:13 PM	Tube furnace set to 1000
12/29/2010	1:29:13 PM	H2 valve closed
12/29/2010	1:29:13 PM	BCl3 valve closed
12/29/2010	1:29:13 PM	PH3 valve closed
12/29/2010	1:29:13 PM	SiCl4 pre valve closed
12/29/2010	1:29:13 PM	SiCl4 post valve closed
12/29/2010	1:29:13 PM	Main Vac valve closed
12/29/2010	1:29:13 PM	Bypass valve closed
12/29/2010	1:29:13 PM	Helium valve opened
12/29/2010	1:29:13 PM	Bubbler valve opened
12/29/2010	1:29:13 PM	Helium MFC set to  500.000000
12/29/2010	1:29:13 PM	H2 MFC set to  0.000000
12/29/2010	1:29:13 PM	BCl3 MFC set to  0.000000
12/29/2010	1:29:13 PM	PHl3 MFC set to  0.000000
12/29/2010	1:29:13 PM	SiCl4 MFC set to  0.000000
12/29/2010	1:29:13 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	1:29:13 PM	Tube furnace set to 0
12/29/2010	1:49:13 PM	Helium valve closed
12/29/2010	1:49:13 PM	H2 valve closed
12/29/2010	1:49:13 PM	BCl3 valve closed
12/29/2010	1:49:13 PM	PH3 valve closed
12/29/2010	1:49:13 PM	SiCl4 pre valve closed
12/29/2010	1:49:13 PM	SiCl4 post valve closed
12/29/2010	1:49:13 PM	Main Vac valve closed
12/29/2010	1:49:13 PM	Bypass valve closed
12/29/2010	1:49:13 PM	Bubbler valve closed
12/29/2010	1:49:13 PM	Helium MFC set to  0.000000
12/29/2010	1:49:13 PM	H2 MFC set to  0.000000
12/29/2010	1:49:13 PM	BCl3 MFC set to  0.000000
12/29/2010	1:49:13 PM	PHl3 MFC set to  0.000000
12/29/2010	1:49:13 PM	SiCl4 MFC set to  0.000000
12/29/2010	1:49:13 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	1:49:13 PM	Tube furnace set to 0
12/29/2010	1:49:13 PM	Run finished at 1:49 PM
12/29/2010	2:07:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/29/2010	2:07:23 PM	Recipe started at 2:07 PM
12/29/2010	2:07:23 PM	H2 valve closed
12/29/2010	2:07:23 PM	BCl3 valve closed
12/29/2010	2:07:23 PM	PH3 valve closed
12/29/2010	2:07:23 PM	SiCl4 pre valve closed
12/29/2010	2:07:23 PM	SiCl4 post valve closed
12/29/2010	2:07:23 PM	Main Vac valve closed
12/29/2010	2:07:23 PM	Bypass valve closed
12/29/2010	2:07:23 PM	Bubbler valve closed
12/29/2010	2:07:23 PM	Helium valve opened
12/29/2010	2:07:23 PM	Helium MFC set to  500.000000
12/29/2010	2:07:23 PM	H2 MFC set to  0.000000
12/29/2010	2:07:23 PM	BCl3 MFC set to  0.000000
12/29/2010	2:07:23 PM	PHl3 MFC set to  0.000000
12/29/2010	2:07:23 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:07:23 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:07:23 PM	Tube furnace set to 0
12/29/2010	2:07:31 PM	Helium valve closed
12/29/2010	2:07:31 PM	H2 valve closed
12/29/2010	2:07:31 PM	BCl3 valve closed
12/29/2010	2:07:31 PM	PH3 valve closed
12/29/2010	2:07:31 PM	SiCl4 pre valve closed
12/29/2010	2:07:31 PM	SiCl4 post valve closed
12/29/2010	2:07:31 PM	Main Vac valve closed
12/29/2010	2:07:31 PM	Bypass valve closed
12/29/2010	2:07:31 PM	Bubbler valve closed
12/29/2010	2:07:31 PM	Helium MFC set to  0.000000
12/29/2010	2:07:31 PM	H2 MFC set to  0.000000
12/29/2010	2:07:31 PM	BCl3 MFC set to  0.000000
12/29/2010	2:07:31 PM	PHl3 MFC set to  0.000000
12/29/2010	2:07:31 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:07:31 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:07:31 PM	Tube furnace set to 0
12/29/2010	2:07:32 PM	Run finished at 2:07 PM
12/29/2010	2:07:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/29/2010	2:16:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	2:16:49 PM	Recipe started at 2:16 PM
12/29/2010	2:16:49 PM	Helium valve closed
12/29/2010	2:16:49 PM	H2 valve closed
12/29/2010	2:16:49 PM	BCl3 valve closed
12/29/2010	2:16:49 PM	PH3 valve closed
12/29/2010	2:16:49 PM	SiCl4 pre valve closed
12/29/2010	2:16:49 PM	SiCl4 post valve closed
12/29/2010	2:16:49 PM	Main Vac valve closed
12/29/2010	2:16:49 PM	Bubbler valve closed
12/29/2010	2:16:49 PM	Bypass valve opened
12/29/2010	2:16:49 PM	Helium MFC set to  0.000000
12/29/2010	2:16:49 PM	H2 MFC set to  0.000000
12/29/2010	2:16:49 PM	BCl3 MFC set to  0.000000
12/29/2010	2:16:49 PM	PHl3 MFC set to  0.000000
12/29/2010	2:16:49 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:16:49 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:16:49 PM	Tube furnace set to 0
12/29/2010	2:17:50 PM	Helium valve closed
12/29/2010	2:17:50 PM	H2 valve closed
12/29/2010	2:17:50 PM	BCl3 valve closed
12/29/2010	2:17:50 PM	PH3 valve closed
12/29/2010	2:17:50 PM	SiCl4 pre valve closed
12/29/2010	2:17:50 PM	SiCl4 post valve closed
12/29/2010	2:17:50 PM	Bubbler valve closed
12/29/2010	2:17:50 PM	Main Vac valve opened
12/29/2010	2:17:50 PM	Bypass valve opened
12/29/2010	2:17:50 PM	Helium MFC set to  0.000000
12/29/2010	2:17:50 PM	H2 MFC set to  0.000000
12/29/2010	2:17:50 PM	BCl3 MFC set to  0.000000
12/29/2010	2:17:50 PM	PHl3 MFC set to  0.000000
12/29/2010	2:17:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:17:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:17:50 PM	Tube furnace set to 0
12/29/2010	2:17:50 PM	Run finished at 2:17 PM
12/29/2010	2:17:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	2:19:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	2:19:33 PM	Recipe started at 2:19 PM
12/29/2010	2:19:33 PM	Helium valve closed
12/29/2010	2:19:33 PM	H2 valve closed
12/29/2010	2:19:33 PM	BCl3 valve closed
12/29/2010	2:19:33 PM	PH3 valve closed
12/29/2010	2:19:33 PM	SiCl4 pre valve closed
12/29/2010	2:19:33 PM	SiCl4 post valve closed
12/29/2010	2:19:33 PM	Main Vac valve closed
12/29/2010	2:19:33 PM	Bubbler valve closed
12/29/2010	2:19:33 PM	Bypass valve opened
12/29/2010	2:19:33 PM	Helium MFC set to  0.000000
12/29/2010	2:19:33 PM	H2 MFC set to  0.000000
12/29/2010	2:19:33 PM	BCl3 MFC set to  0.000000
12/29/2010	2:19:33 PM	PHl3 MFC set to  0.000000
12/29/2010	2:19:33 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:19:33 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:19:33 PM	Tube furnace set to 0
12/29/2010	2:19:34 PM	Helium valve closed
12/29/2010	2:19:34 PM	H2 valve closed
12/29/2010	2:19:34 PM	BCl3 valve closed
12/29/2010	2:19:34 PM	PH3 valve closed
12/29/2010	2:19:34 PM	SiCl4 pre valve closed
12/29/2010	2:19:34 PM	SiCl4 post valve closed
12/29/2010	2:19:34 PM	Bubbler valve closed
12/29/2010	2:19:34 PM	Main Vac valve opened
12/29/2010	2:19:34 PM	Bypass valve opened
12/29/2010	2:19:34 PM	Helium MFC set to  0.000000
12/29/2010	2:19:34 PM	H2 MFC set to  0.000000
12/29/2010	2:19:34 PM	BCl3 MFC set to  0.000000
12/29/2010	2:19:34 PM	PHl3 MFC set to  0.000000
12/29/2010	2:19:34 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:19:34 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:19:34 PM	Tube furnace set to 0
12/29/2010	2:20:34 PM	H2 valve closed
12/29/2010	2:20:34 PM	BCl3 valve closed
12/29/2010	2:20:34 PM	PH3 valve closed
12/29/2010	2:20:34 PM	SiCl4 pre valve closed
12/29/2010	2:20:34 PM	SiCl4 post valve closed
12/29/2010	2:20:34 PM	Bubbler valve closed
12/29/2010	2:20:34 PM	Helium valve opened
12/29/2010	2:20:34 PM	Main Vac valve opened
12/29/2010	2:20:34 PM	Bypass valve opened
12/29/2010	2:20:34 PM	Helium MFC set to  100.000000
12/29/2010	2:20:34 PM	H2 MFC set to  0.000000
12/29/2010	2:20:34 PM	BCl3 MFC set to  0.000000
12/29/2010	2:20:34 PM	PHl3 MFC set to  0.000000
12/29/2010	2:20:34 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:20:34 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:20:34 PM	Tube furnace set to 0
12/29/2010	2:21:34 PM	Helium valve closed
12/29/2010	2:21:34 PM	H2 valve closed
12/29/2010	2:21:34 PM	BCl3 valve closed
12/29/2010	2:21:34 PM	PH3 valve closed
12/29/2010	2:21:34 PM	SiCl4 pre valve closed
12/29/2010	2:21:34 PM	SiCl4 post valve closed
12/29/2010	2:21:34 PM	Bubbler valve closed
12/29/2010	2:21:34 PM	Main Vac valve opened
12/29/2010	2:21:34 PM	Bypass valve opened
12/29/2010	2:21:34 PM	Helium MFC set to  0.000000
12/29/2010	2:21:34 PM	H2 MFC set to  0.000000
12/29/2010	2:21:34 PM	BCl3 MFC set to  0.000000
12/29/2010	2:21:34 PM	PHl3 MFC set to  0.000000
12/29/2010	2:21:34 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:21:34 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:21:34 PM	Tube furnace set to 0
12/29/2010	2:22:34 PM	H2 valve closed
12/29/2010	2:22:34 PM	BCl3 valve closed
12/29/2010	2:22:34 PM	PH3 valve closed
12/29/2010	2:22:34 PM	SiCl4 pre valve closed
12/29/2010	2:22:34 PM	SiCl4 post valve closed
12/29/2010	2:22:34 PM	Bubbler valve closed
12/29/2010	2:22:34 PM	Helium valve opened
12/29/2010	2:22:34 PM	Main Vac valve opened
12/29/2010	2:22:34 PM	Bypass valve opened
12/29/2010	2:22:34 PM	Helium MFC set to  100.000000
12/29/2010	2:22:34 PM	H2 MFC set to  0.000000
12/29/2010	2:22:34 PM	BCl3 MFC set to  0.000000
12/29/2010	2:22:34 PM	PHl3 MFC set to  0.000000
12/29/2010	2:22:34 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:22:34 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:22:34 PM	Tube furnace set to 0
12/29/2010	2:23:34 PM	Helium valve closed
12/29/2010	2:23:35 PM	H2 valve closed
12/29/2010	2:23:35 PM	BCl3 valve closed
12/29/2010	2:23:35 PM	PH3 valve closed
12/29/2010	2:23:35 PM	SiCl4 pre valve closed
12/29/2010	2:23:35 PM	SiCl4 post valve closed
12/29/2010	2:23:35 PM	Bubbler valve closed
12/29/2010	2:23:35 PM	Main Vac valve opened
12/29/2010	2:23:35 PM	Bypass valve opened
12/29/2010	2:23:35 PM	Helium MFC set to  0.000000
12/29/2010	2:23:35 PM	H2 MFC set to  0.000000
12/29/2010	2:23:35 PM	BCl3 MFC set to  0.000000
12/29/2010	2:23:35 PM	PHl3 MFC set to  0.000000
12/29/2010	2:23:35 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:23:35 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:23:35 PM	Tube furnace set to 0
12/29/2010	2:24:35 PM	H2 valve closed
12/29/2010	2:24:35 PM	BCl3 valve closed
12/29/2010	2:24:35 PM	PH3 valve closed
12/29/2010	2:24:35 PM	SiCl4 pre valve closed
12/29/2010	2:24:35 PM	SiCl4 post valve closed
12/29/2010	2:24:35 PM	Bubbler valve closed
12/29/2010	2:24:35 PM	Helium valve opened
12/29/2010	2:24:35 PM	Main Vac valve opened
12/29/2010	2:24:35 PM	Bypass valve opened
12/29/2010	2:24:35 PM	Helium MFC set to  100.000000
12/29/2010	2:24:35 PM	H2 MFC set to  0.000000
12/29/2010	2:24:35 PM	BCl3 MFC set to  0.000000
12/29/2010	2:24:35 PM	PHl3 MFC set to  0.000000
12/29/2010	2:24:35 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:24:35 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:24:35 PM	Tube furnace set to 0
12/29/2010	2:25:35 PM	Helium valve closed
12/29/2010	2:25:35 PM	H2 valve closed
12/29/2010	2:25:35 PM	BCl3 valve closed
12/29/2010	2:25:35 PM	PH3 valve closed
12/29/2010	2:25:35 PM	SiCl4 pre valve closed
12/29/2010	2:25:35 PM	SiCl4 post valve closed
12/29/2010	2:25:35 PM	Bubbler valve closed
12/29/2010	2:25:35 PM	Main Vac valve opened
12/29/2010	2:25:35 PM	Bypass valve opened
12/29/2010	2:25:35 PM	Helium MFC set to  0.000000
12/29/2010	2:25:35 PM	H2 MFC set to  0.000000
12/29/2010	2:25:35 PM	BCl3 MFC set to  0.000000
12/29/2010	2:25:35 PM	PHl3 MFC set to  0.000000
12/29/2010	2:25:35 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:25:35 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:25:35 PM	Tube furnace set to 0
12/29/2010	2:26:35 PM	H2 valve closed
12/29/2010	2:26:35 PM	BCl3 valve closed
12/29/2010	2:26:35 PM	PH3 valve closed
12/29/2010	2:26:35 PM	SiCl4 pre valve closed
12/29/2010	2:26:35 PM	SiCl4 post valve closed
12/29/2010	2:26:35 PM	Bubbler valve closed
12/29/2010	2:26:35 PM	Helium valve opened
12/29/2010	2:26:35 PM	Main Vac valve opened
12/29/2010	2:26:35 PM	Bypass valve opened
12/29/2010	2:26:35 PM	Helium MFC set to  100.000000
12/29/2010	2:26:35 PM	H2 MFC set to  0.000000
12/29/2010	2:26:35 PM	BCl3 MFC set to  0.000000
12/29/2010	2:26:35 PM	PHl3 MFC set to  0.000000
12/29/2010	2:26:35 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:26:35 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:26:35 PM	Tube furnace set to 0
12/29/2010	2:27:35 PM	Helium valve closed
12/29/2010	2:27:35 PM	H2 valve closed
12/29/2010	2:27:35 PM	BCl3 valve closed
12/29/2010	2:27:35 PM	PH3 valve closed
12/29/2010	2:27:35 PM	SiCl4 pre valve closed
12/29/2010	2:27:35 PM	SiCl4 post valve closed
12/29/2010	2:27:35 PM	Bubbler valve closed
12/29/2010	2:27:35 PM	Main Vac valve opened
12/29/2010	2:27:35 PM	Bypass valve opened
12/29/2010	2:27:35 PM	Helium MFC set to  0.000000
12/29/2010	2:27:35 PM	H2 MFC set to  0.000000
12/29/2010	2:27:35 PM	BCl3 MFC set to  0.000000
12/29/2010	2:27:35 PM	PHl3 MFC set to  0.000000
12/29/2010	2:27:35 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:27:35 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:27:35 PM	Tube furnace set to 0
12/29/2010	2:28:36 PM	H2 valve closed
12/29/2010	2:28:36 PM	BCl3 valve closed
12/29/2010	2:28:36 PM	PH3 valve closed
12/29/2010	2:28:36 PM	SiCl4 pre valve closed
12/29/2010	2:28:36 PM	SiCl4 post valve closed
12/29/2010	2:28:36 PM	Bubbler valve closed
12/29/2010	2:28:36 PM	Helium valve opened
12/29/2010	2:28:36 PM	Main Vac valve opened
12/29/2010	2:28:36 PM	Bypass valve opened
12/29/2010	2:28:36 PM	Helium MFC set to  100.000000
12/29/2010	2:28:36 PM	H2 MFC set to  0.000000
12/29/2010	2:28:36 PM	BCl3 MFC set to  0.000000
12/29/2010	2:28:36 PM	PHl3 MFC set to  0.000000
12/29/2010	2:28:36 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:28:36 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:28:36 PM	Tube furnace set to 0
12/29/2010	2:29:36 PM	Helium valve closed
12/29/2010	2:29:36 PM	H2 valve closed
12/29/2010	2:29:36 PM	BCl3 valve closed
12/29/2010	2:29:36 PM	PH3 valve closed
12/29/2010	2:29:36 PM	SiCl4 pre valve closed
12/29/2010	2:29:36 PM	SiCl4 post valve closed
12/29/2010	2:29:36 PM	Bubbler valve closed
12/29/2010	2:29:36 PM	Main Vac valve opened
12/29/2010	2:29:36 PM	Bypass valve opened
12/29/2010	2:29:36 PM	Helium MFC set to  0.000000
12/29/2010	2:29:36 PM	H2 MFC set to  0.000000
12/29/2010	2:29:36 PM	BCl3 MFC set to  0.000000
12/29/2010	2:29:36 PM	PHl3 MFC set to  0.000000
12/29/2010	2:29:36 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:29:36 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:29:36 PM	Tube furnace set to 0
12/29/2010	2:30:36 PM	H2 valve closed
12/29/2010	2:30:36 PM	BCl3 valve closed
12/29/2010	2:30:36 PM	PH3 valve closed
12/29/2010	2:30:36 PM	SiCl4 pre valve closed
12/29/2010	2:30:36 PM	SiCl4 post valve closed
12/29/2010	2:30:36 PM	Bubbler valve closed
12/29/2010	2:30:36 PM	Helium valve opened
12/29/2010	2:30:36 PM	Main Vac valve opened
12/29/2010	2:30:36 PM	Bypass valve opened
12/29/2010	2:30:36 PM	Helium MFC set to  100.000000
12/29/2010	2:30:36 PM	H2 MFC set to  0.000000
12/29/2010	2:30:36 PM	BCl3 MFC set to  0.000000
12/29/2010	2:30:36 PM	PHl3 MFC set to  0.000000
12/29/2010	2:30:36 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:30:36 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:30:36 PM	Tube furnace set to 0
12/29/2010	2:31:36 PM	Helium valve closed
12/29/2010	2:31:36 PM	H2 valve closed
12/29/2010	2:31:36 PM	BCl3 valve closed
12/29/2010	2:31:36 PM	PH3 valve closed
12/29/2010	2:31:36 PM	SiCl4 pre valve closed
12/29/2010	2:31:36 PM	SiCl4 post valve closed
12/29/2010	2:31:36 PM	Bubbler valve closed
12/29/2010	2:31:36 PM	Main Vac valve opened
12/29/2010	2:31:36 PM	Bypass valve opened
12/29/2010	2:31:36 PM	Helium MFC set to  0.000000
12/29/2010	2:31:36 PM	H2 MFC set to  0.000000
12/29/2010	2:31:36 PM	BCl3 MFC set to  0.000000
12/29/2010	2:31:36 PM	PHl3 MFC set to  0.000000
12/29/2010	2:31:36 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:31:36 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:31:36 PM	Tube furnace set to 0
12/29/2010	2:32:36 PM	H2 valve closed
12/29/2010	2:32:36 PM	BCl3 valve closed
12/29/2010	2:32:36 PM	PH3 valve closed
12/29/2010	2:32:36 PM	SiCl4 pre valve closed
12/29/2010	2:32:36 PM	SiCl4 post valve closed
12/29/2010	2:32:36 PM	Bubbler valve closed
12/29/2010	2:32:36 PM	Helium valve opened
12/29/2010	2:32:36 PM	Main Vac valve opened
12/29/2010	2:32:36 PM	Bypass valve opened
12/29/2010	2:32:36 PM	Helium MFC set to  100.000000
12/29/2010	2:32:36 PM	H2 MFC set to  0.000000
12/29/2010	2:32:36 PM	BCl3 MFC set to  0.000000
12/29/2010	2:32:36 PM	PHl3 MFC set to  0.000000
12/29/2010	2:32:36 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:32:36 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:32:37 PM	Tube furnace set to 0
12/29/2010	2:33:37 PM	Helium valve closed
12/29/2010	2:33:37 PM	H2 valve closed
12/29/2010	2:33:37 PM	BCl3 valve closed
12/29/2010	2:33:37 PM	PH3 valve closed
12/29/2010	2:33:37 PM	SiCl4 pre valve closed
12/29/2010	2:33:37 PM	SiCl4 post valve closed
12/29/2010	2:33:37 PM	Bubbler valve closed
12/29/2010	2:33:37 PM	Main Vac valve opened
12/29/2010	2:33:37 PM	Bypass valve opened
12/29/2010	2:33:37 PM	Helium MFC set to  0.000000
12/29/2010	2:33:37 PM	H2 MFC set to  0.000000
12/29/2010	2:33:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:33:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:33:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:33:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:33:37 PM	Tube furnace set to 0
12/29/2010	2:34:37 PM	H2 valve closed
12/29/2010	2:34:37 PM	BCl3 valve closed
12/29/2010	2:34:37 PM	PH3 valve closed
12/29/2010	2:34:37 PM	SiCl4 pre valve closed
12/29/2010	2:34:37 PM	SiCl4 post valve closed
12/29/2010	2:34:37 PM	Bubbler valve closed
12/29/2010	2:34:37 PM	Helium valve opened
12/29/2010	2:34:37 PM	Main Vac valve opened
12/29/2010	2:34:37 PM	Bypass valve opened
12/29/2010	2:34:37 PM	Helium MFC set to  100.000000
12/29/2010	2:34:37 PM	H2 MFC set to  0.000000
12/29/2010	2:34:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:34:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:34:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:34:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:34:37 PM	Tube furnace set to 0
12/29/2010	2:35:37 PM	Helium valve closed
12/29/2010	2:35:37 PM	H2 valve closed
12/29/2010	2:35:37 PM	BCl3 valve closed
12/29/2010	2:35:37 PM	PH3 valve closed
12/29/2010	2:35:37 PM	SiCl4 pre valve closed
12/29/2010	2:35:37 PM	SiCl4 post valve closed
12/29/2010	2:35:37 PM	Bubbler valve closed
12/29/2010	2:35:37 PM	Main Vac valve opened
12/29/2010	2:35:37 PM	Bypass valve opened
12/29/2010	2:35:37 PM	Helium MFC set to  0.000000
12/29/2010	2:35:37 PM	H2 MFC set to  0.000000
12/29/2010	2:35:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:35:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:35:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:35:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:35:37 PM	Tube furnace set to 0
12/29/2010	2:36:37 PM	H2 valve closed
12/29/2010	2:36:37 PM	BCl3 valve closed
12/29/2010	2:36:37 PM	PH3 valve closed
12/29/2010	2:36:37 PM	SiCl4 pre valve closed
12/29/2010	2:36:37 PM	SiCl4 post valve closed
12/29/2010	2:36:37 PM	Bubbler valve closed
12/29/2010	2:36:37 PM	Helium valve opened
12/29/2010	2:36:37 PM	Main Vac valve opened
12/29/2010	2:36:37 PM	Bypass valve opened
12/29/2010	2:36:37 PM	Helium MFC set to  100.000000
12/29/2010	2:36:37 PM	H2 MFC set to  0.000000
12/29/2010	2:36:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:36:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:36:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:36:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:36:37 PM	Tube furnace set to 0
12/29/2010	2:37:37 PM	Helium valve closed
12/29/2010	2:37:37 PM	H2 valve closed
12/29/2010	2:37:37 PM	BCl3 valve closed
12/29/2010	2:37:37 PM	PH3 valve closed
12/29/2010	2:37:37 PM	SiCl4 pre valve closed
12/29/2010	2:37:37 PM	SiCl4 post valve closed
12/29/2010	2:37:37 PM	Bubbler valve closed
12/29/2010	2:37:37 PM	Main Vac valve opened
12/29/2010	2:37:37 PM	Bypass valve opened
12/29/2010	2:37:37 PM	Helium MFC set to  0.000000
12/29/2010	2:37:37 PM	H2 MFC set to  0.000000
12/29/2010	2:37:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:37:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:37:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:37:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:37:38 PM	Tube furnace set to 0
12/29/2010	2:38:37 PM	H2 valve closed
12/29/2010	2:38:37 PM	BCl3 valve closed
12/29/2010	2:38:37 PM	PH3 valve closed
12/29/2010	2:38:37 PM	SiCl4 pre valve closed
12/29/2010	2:38:37 PM	SiCl4 post valve closed
12/29/2010	2:38:37 PM	Bubbler valve closed
12/29/2010	2:38:37 PM	Helium valve opened
12/29/2010	2:38:37 PM	Main Vac valve opened
12/29/2010	2:38:37 PM	Bypass valve opened
12/29/2010	2:38:37 PM	Helium MFC set to  100.000000
12/29/2010	2:38:37 PM	H2 MFC set to  0.000000
12/29/2010	2:38:37 PM	BCl3 MFC set to  0.000000
12/29/2010	2:38:37 PM	PHl3 MFC set to  0.000000
12/29/2010	2:38:37 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:38:37 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:38:38 PM	Tube furnace set to 0
12/29/2010	2:39:38 PM	Helium valve closed
12/29/2010	2:39:38 PM	H2 valve closed
12/29/2010	2:39:38 PM	BCl3 valve closed
12/29/2010	2:39:38 PM	PH3 valve closed
12/29/2010	2:39:38 PM	SiCl4 pre valve closed
12/29/2010	2:39:38 PM	SiCl4 post valve closed
12/29/2010	2:39:38 PM	Bubbler valve closed
12/29/2010	2:39:38 PM	Main Vac valve opened
12/29/2010	2:39:38 PM	Bypass valve opened
12/29/2010	2:39:38 PM	Helium MFC set to  0.000000
12/29/2010	2:39:38 PM	H2 MFC set to  0.000000
12/29/2010	2:39:38 PM	BCl3 MFC set to  0.000000
12/29/2010	2:39:38 PM	PHl3 MFC set to  0.000000
12/29/2010	2:39:38 PM	SiCl4 MFC set to  0.000000
12/29/2010	2:39:38 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	2:39:38 PM	Tube furnace set to 0
12/29/2010	2:39:39 PM	Run finished at 2:39 PM
12/29/2010	2:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	3:52:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	3:52:52 PM	Recipe started at 3:52 PM
12/29/2010	3:52:52 PM	Helium valve closed
12/29/2010	3:52:52 PM	H2 valve closed
12/29/2010	3:52:52 PM	BCl3 valve closed
12/29/2010	3:52:52 PM	PH3 valve closed
12/29/2010	3:52:52 PM	SiCl4 pre valve closed
12/29/2010	3:52:52 PM	SiCl4 post valve closed
12/29/2010	3:52:52 PM	Main Vac valve closed
12/29/2010	3:52:52 PM	Bubbler valve closed
12/29/2010	3:52:52 PM	Bypass valve opened
12/29/2010	3:52:52 PM	Helium MFC set to  0.000000
12/29/2010	3:52:52 PM	H2 MFC set to  0.000000
12/29/2010	3:52:52 PM	BCl3 MFC set to  0.000000
12/29/2010	3:52:52 PM	PHl3 MFC set to  0.000000
12/29/2010	3:52:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:52:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:52:52 PM	Tube furnace set to 0
12/29/2010	3:52:53 PM	Helium valve closed
12/29/2010	3:52:53 PM	H2 valve closed
12/29/2010	3:52:53 PM	BCl3 valve closed
12/29/2010	3:52:53 PM	PH3 valve closed
12/29/2010	3:52:53 PM	SiCl4 pre valve closed
12/29/2010	3:52:53 PM	SiCl4 post valve closed
12/29/2010	3:52:53 PM	Bubbler valve closed
12/29/2010	3:52:53 PM	Main Vac valve opened
12/29/2010	3:52:53 PM	Bypass valve opened
12/29/2010	3:52:53 PM	Helium MFC set to  0.000000
12/29/2010	3:52:53 PM	H2 MFC set to  0.000000
12/29/2010	3:52:53 PM	BCl3 MFC set to  0.000000
12/29/2010	3:52:53 PM	PHl3 MFC set to  0.000000
12/29/2010	3:52:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:52:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:52:53 PM	Tube furnace set to 0
12/29/2010	3:53:53 PM	H2 valve closed
12/29/2010	3:53:53 PM	BCl3 valve closed
12/29/2010	3:53:53 PM	PH3 valve closed
12/29/2010	3:53:53 PM	SiCl4 pre valve closed
12/29/2010	3:53:53 PM	SiCl4 post valve closed
12/29/2010	3:53:53 PM	Bubbler valve closed
12/29/2010	3:53:53 PM	Helium valve opened
12/29/2010	3:53:53 PM	Main Vac valve opened
12/29/2010	3:53:53 PM	Bypass valve opened
12/29/2010	3:53:53 PM	Helium MFC set to  100.000000
12/29/2010	3:53:53 PM	H2 MFC set to  0.000000
12/29/2010	3:53:53 PM	BCl3 MFC set to  0.000000
12/29/2010	3:53:53 PM	PHl3 MFC set to  0.000000
12/29/2010	3:53:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:53:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:53:53 PM	Tube furnace set to 0
12/29/2010	3:54:53 PM	Helium valve closed
12/29/2010	3:54:53 PM	H2 valve closed
12/29/2010	3:54:53 PM	BCl3 valve closed
12/29/2010	3:54:53 PM	PH3 valve closed
12/29/2010	3:54:53 PM	SiCl4 pre valve closed
12/29/2010	3:54:53 PM	SiCl4 post valve closed
12/29/2010	3:54:53 PM	Bubbler valve closed
12/29/2010	3:54:53 PM	Main Vac valve opened
12/29/2010	3:54:53 PM	Bypass valve opened
12/29/2010	3:54:53 PM	Helium MFC set to  0.000000
12/29/2010	3:54:53 PM	H2 MFC set to  0.000000
12/29/2010	3:54:53 PM	BCl3 MFC set to  0.000000
12/29/2010	3:54:53 PM	PHl3 MFC set to  0.000000
12/29/2010	3:54:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:54:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:54:53 PM	Tube furnace set to 0
12/29/2010	3:55:53 PM	H2 valve closed
12/29/2010	3:55:53 PM	BCl3 valve closed
12/29/2010	3:55:53 PM	PH3 valve closed
12/29/2010	3:55:53 PM	SiCl4 pre valve closed
12/29/2010	3:55:53 PM	SiCl4 post valve closed
12/29/2010	3:55:53 PM	Bubbler valve closed
12/29/2010	3:55:53 PM	Helium valve opened
12/29/2010	3:55:53 PM	Main Vac valve opened
12/29/2010	3:55:53 PM	Bypass valve opened
12/29/2010	3:55:53 PM	Helium MFC set to  100.000000
12/29/2010	3:55:53 PM	H2 MFC set to  0.000000
12/29/2010	3:55:53 PM	BCl3 MFC set to  0.000000
12/29/2010	3:55:53 PM	PHl3 MFC set to  0.000000
12/29/2010	3:55:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:55:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:55:53 PM	Tube furnace set to 0
12/29/2010	3:56:53 PM	Helium valve closed
12/29/2010	3:56:53 PM	H2 valve closed
12/29/2010	3:56:53 PM	BCl3 valve closed
12/29/2010	3:56:53 PM	PH3 valve closed
12/29/2010	3:56:53 PM	SiCl4 pre valve closed
12/29/2010	3:56:53 PM	SiCl4 post valve closed
12/29/2010	3:56:53 PM	Bubbler valve closed
12/29/2010	3:56:53 PM	Main Vac valve opened
12/29/2010	3:56:53 PM	Bypass valve opened
12/29/2010	3:56:53 PM	Helium MFC set to  0.000000
12/29/2010	3:56:53 PM	H2 MFC set to  0.000000
12/29/2010	3:56:53 PM	BCl3 MFC set to  0.000000
12/29/2010	3:56:53 PM	PHl3 MFC set to  0.000000
12/29/2010	3:56:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:56:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:56:54 PM	Tube furnace set to 0
12/29/2010	3:57:54 PM	H2 valve closed
12/29/2010	3:57:54 PM	BCl3 valve closed
12/29/2010	3:57:54 PM	PH3 valve closed
12/29/2010	3:57:54 PM	SiCl4 pre valve closed
12/29/2010	3:57:54 PM	SiCl4 post valve closed
12/29/2010	3:57:54 PM	Bubbler valve closed
12/29/2010	3:57:54 PM	Helium valve opened
12/29/2010	3:57:54 PM	Main Vac valve opened
12/29/2010	3:57:54 PM	Bypass valve opened
12/29/2010	3:57:54 PM	Helium MFC set to  100.000000
12/29/2010	3:57:54 PM	H2 MFC set to  0.000000
12/29/2010	3:57:54 PM	BCl3 MFC set to  0.000000
12/29/2010	3:57:54 PM	PHl3 MFC set to  0.000000
12/29/2010	3:57:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:57:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:57:54 PM	Tube furnace set to 0
12/29/2010	3:58:54 PM	Helium valve closed
12/29/2010	3:58:54 PM	H2 valve closed
12/29/2010	3:58:54 PM	BCl3 valve closed
12/29/2010	3:58:54 PM	PH3 valve closed
12/29/2010	3:58:54 PM	SiCl4 pre valve closed
12/29/2010	3:58:54 PM	SiCl4 post valve closed
12/29/2010	3:58:54 PM	Bubbler valve closed
12/29/2010	3:58:54 PM	Main Vac valve opened
12/29/2010	3:58:54 PM	Bypass valve opened
12/29/2010	3:58:54 PM	Helium MFC set to  0.000000
12/29/2010	3:58:54 PM	H2 MFC set to  0.000000
12/29/2010	3:58:54 PM	BCl3 MFC set to  0.000000
12/29/2010	3:58:54 PM	PHl3 MFC set to  0.000000
12/29/2010	3:58:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:58:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:58:54 PM	Tube furnace set to 0
12/29/2010	3:59:54 PM	H2 valve closed
12/29/2010	3:59:54 PM	BCl3 valve closed
12/29/2010	3:59:54 PM	PH3 valve closed
12/29/2010	3:59:54 PM	SiCl4 pre valve closed
12/29/2010	3:59:54 PM	SiCl4 post valve closed
12/29/2010	3:59:54 PM	Bubbler valve closed
12/29/2010	3:59:54 PM	Helium valve opened
12/29/2010	3:59:54 PM	Main Vac valve opened
12/29/2010	3:59:54 PM	Bypass valve opened
12/29/2010	3:59:54 PM	Helium MFC set to  100.000000
12/29/2010	3:59:54 PM	H2 MFC set to  0.000000
12/29/2010	3:59:54 PM	BCl3 MFC set to  0.000000
12/29/2010	3:59:54 PM	PHl3 MFC set to  0.000000
12/29/2010	3:59:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	3:59:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	3:59:54 PM	Tube furnace set to 0
12/29/2010	4:00:54 PM	Helium valve closed
12/29/2010	4:00:54 PM	H2 valve closed
12/29/2010	4:00:54 PM	BCl3 valve closed
12/29/2010	4:00:54 PM	PH3 valve closed
12/29/2010	4:00:54 PM	SiCl4 pre valve closed
12/29/2010	4:00:54 PM	SiCl4 post valve closed
12/29/2010	4:00:54 PM	Bubbler valve closed
12/29/2010	4:00:54 PM	Main Vac valve opened
12/29/2010	4:00:54 PM	Bypass valve opened
12/29/2010	4:00:54 PM	Helium MFC set to  0.000000
12/29/2010	4:00:54 PM	H2 MFC set to  0.000000
12/29/2010	4:00:54 PM	BCl3 MFC set to  0.000000
12/29/2010	4:00:54 PM	PHl3 MFC set to  0.000000
12/29/2010	4:00:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:00:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:00:54 PM	Tube furnace set to 0
12/29/2010	4:01:54 PM	H2 valve closed
12/29/2010	4:01:54 PM	BCl3 valve closed
12/29/2010	4:01:54 PM	PH3 valve closed
12/29/2010	4:01:54 PM	SiCl4 pre valve closed
12/29/2010	4:01:54 PM	SiCl4 post valve closed
12/29/2010	4:01:54 PM	Bubbler valve closed
12/29/2010	4:01:54 PM	Helium valve opened
12/29/2010	4:01:54 PM	Main Vac valve opened
12/29/2010	4:01:54 PM	Bypass valve opened
12/29/2010	4:01:54 PM	Helium MFC set to  100.000000
12/29/2010	4:01:54 PM	H2 MFC set to  0.000000
12/29/2010	4:01:54 PM	BCl3 MFC set to  0.000000
12/29/2010	4:01:54 PM	PHl3 MFC set to  0.000000
12/29/2010	4:01:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:01:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:01:55 PM	Tube furnace set to 0
12/29/2010	4:02:55 PM	Helium valve closed
12/29/2010	4:02:55 PM	H2 valve closed
12/29/2010	4:02:55 PM	BCl3 valve closed
12/29/2010	4:02:55 PM	PH3 valve closed
12/29/2010	4:02:55 PM	SiCl4 pre valve closed
12/29/2010	4:02:55 PM	SiCl4 post valve closed
12/29/2010	4:02:55 PM	Bubbler valve closed
12/29/2010	4:02:55 PM	Main Vac valve opened
12/29/2010	4:02:55 PM	Bypass valve opened
12/29/2010	4:02:55 PM	Helium MFC set to  0.000000
12/29/2010	4:02:55 PM	H2 MFC set to  0.000000
12/29/2010	4:02:55 PM	BCl3 MFC set to  0.000000
12/29/2010	4:02:55 PM	PHl3 MFC set to  0.000000
12/29/2010	4:02:55 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:02:55 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:02:55 PM	Tube furnace set to 0
12/29/2010	4:03:55 PM	H2 valve closed
12/29/2010	4:03:55 PM	BCl3 valve closed
12/29/2010	4:03:55 PM	PH3 valve closed
12/29/2010	4:03:55 PM	SiCl4 pre valve closed
12/29/2010	4:03:55 PM	SiCl4 post valve closed
12/29/2010	4:03:55 PM	Bubbler valve closed
12/29/2010	4:03:55 PM	Helium valve opened
12/29/2010	4:03:55 PM	Main Vac valve opened
12/29/2010	4:03:55 PM	Bypass valve opened
12/29/2010	4:03:55 PM	Helium MFC set to  100.000000
12/29/2010	4:03:55 PM	H2 MFC set to  0.000000
12/29/2010	4:03:55 PM	BCl3 MFC set to  0.000000
12/29/2010	4:03:55 PM	PHl3 MFC set to  0.000000
12/29/2010	4:03:55 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:03:55 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:03:55 PM	Tube furnace set to 0
12/29/2010	4:04:55 PM	Helium valve closed
12/29/2010	4:04:55 PM	H2 valve closed
12/29/2010	4:04:55 PM	BCl3 valve closed
12/29/2010	4:04:55 PM	PH3 valve closed
12/29/2010	4:04:55 PM	SiCl4 pre valve closed
12/29/2010	4:04:55 PM	SiCl4 post valve closed
12/29/2010	4:04:55 PM	Bubbler valve closed
12/29/2010	4:04:55 PM	Main Vac valve opened
12/29/2010	4:04:55 PM	Bypass valve opened
12/29/2010	4:04:55 PM	Helium MFC set to  0.000000
12/29/2010	4:04:55 PM	H2 MFC set to  0.000000
12/29/2010	4:04:55 PM	BCl3 MFC set to  0.000000
12/29/2010	4:04:55 PM	PHl3 MFC set to  0.000000
12/29/2010	4:04:55 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:04:55 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:04:55 PM	Tube furnace set to 0
12/29/2010	4:05:55 PM	H2 valve closed
12/29/2010	4:05:55 PM	BCl3 valve closed
12/29/2010	4:05:55 PM	PH3 valve closed
12/29/2010	4:05:55 PM	SiCl4 pre valve closed
12/29/2010	4:05:55 PM	SiCl4 post valve closed
12/29/2010	4:05:55 PM	Bubbler valve closed
12/29/2010	4:05:55 PM	Helium valve opened
12/29/2010	4:05:55 PM	Main Vac valve opened
12/29/2010	4:05:55 PM	Bypass valve opened
12/29/2010	4:05:55 PM	Helium MFC set to  100.000000
12/29/2010	4:05:55 PM	H2 MFC set to  0.000000
12/29/2010	4:05:55 PM	BCl3 MFC set to  0.000000
12/29/2010	4:05:55 PM	PHl3 MFC set to  0.000000
12/29/2010	4:05:55 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:05:55 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:05:55 PM	Tube furnace set to 0
12/29/2010	4:06:55 PM	Helium valve closed
12/29/2010	4:06:55 PM	H2 valve closed
12/29/2010	4:06:55 PM	BCl3 valve closed
12/29/2010	4:06:55 PM	PH3 valve closed
12/29/2010	4:06:55 PM	SiCl4 pre valve closed
12/29/2010	4:06:55 PM	SiCl4 post valve closed
12/29/2010	4:06:55 PM	Bubbler valve closed
12/29/2010	4:06:55 PM	Main Vac valve opened
12/29/2010	4:06:55 PM	Bypass valve opened
12/29/2010	4:06:55 PM	Helium MFC set to  0.000000
12/29/2010	4:06:55 PM	H2 MFC set to  0.000000
12/29/2010	4:06:55 PM	BCl3 MFC set to  0.000000
12/29/2010	4:06:55 PM	PHl3 MFC set to  0.000000
12/29/2010	4:06:55 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:06:55 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:06:56 PM	Tube furnace set to 0
12/29/2010	4:07:56 PM	H2 valve closed
12/29/2010	4:07:56 PM	BCl3 valve closed
12/29/2010	4:07:56 PM	PH3 valve closed
12/29/2010	4:07:56 PM	SiCl4 pre valve closed
12/29/2010	4:07:56 PM	SiCl4 post valve closed
12/29/2010	4:07:56 PM	Bubbler valve closed
12/29/2010	4:07:56 PM	Helium valve opened
12/29/2010	4:07:56 PM	Main Vac valve opened
12/29/2010	4:07:56 PM	Bypass valve opened
12/29/2010	4:07:56 PM	Helium MFC set to  100.000000
12/29/2010	4:07:56 PM	H2 MFC set to  0.000000
12/29/2010	4:07:56 PM	BCl3 MFC set to  0.000000
12/29/2010	4:07:56 PM	PHl3 MFC set to  0.000000
12/29/2010	4:07:56 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:07:56 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:07:56 PM	Tube furnace set to 0
12/29/2010	4:08:56 PM	Helium valve closed
12/29/2010	4:08:56 PM	H2 valve closed
12/29/2010	4:08:56 PM	BCl3 valve closed
12/29/2010	4:08:56 PM	PH3 valve closed
12/29/2010	4:08:56 PM	SiCl4 pre valve closed
12/29/2010	4:08:56 PM	SiCl4 post valve closed
12/29/2010	4:08:56 PM	Bubbler valve closed
12/29/2010	4:08:56 PM	Main Vac valve opened
12/29/2010	4:08:56 PM	Bypass valve opened
12/29/2010	4:08:56 PM	Helium MFC set to  0.000000
12/29/2010	4:08:56 PM	H2 MFC set to  0.000000
12/29/2010	4:08:56 PM	BCl3 MFC set to  0.000000
12/29/2010	4:08:56 PM	PHl3 MFC set to  0.000000
12/29/2010	4:08:56 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:08:56 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:08:56 PM	Tube furnace set to 0
12/29/2010	4:09:56 PM	H2 valve closed
12/29/2010	4:09:56 PM	BCl3 valve closed
12/29/2010	4:09:56 PM	PH3 valve closed
12/29/2010	4:09:56 PM	SiCl4 pre valve closed
12/29/2010	4:09:56 PM	SiCl4 post valve closed
12/29/2010	4:09:56 PM	Bubbler valve closed
12/29/2010	4:09:56 PM	Helium valve opened
12/29/2010	4:09:56 PM	Main Vac valve opened
12/29/2010	4:09:56 PM	Bypass valve opened
12/29/2010	4:09:56 PM	Helium MFC set to  100.000000
12/29/2010	4:09:56 PM	H2 MFC set to  0.000000
12/29/2010	4:09:56 PM	BCl3 MFC set to  0.000000
12/29/2010	4:09:56 PM	PHl3 MFC set to  0.000000
12/29/2010	4:09:56 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:09:56 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:09:56 PM	Tube furnace set to 0
12/29/2010	4:10:56 PM	Helium valve closed
12/29/2010	4:10:56 PM	H2 valve closed
12/29/2010	4:10:56 PM	BCl3 valve closed
12/29/2010	4:10:56 PM	PH3 valve closed
12/29/2010	4:10:56 PM	SiCl4 pre valve closed
12/29/2010	4:10:56 PM	SiCl4 post valve closed
12/29/2010	4:10:56 PM	Bubbler valve closed
12/29/2010	4:10:56 PM	Main Vac valve opened
12/29/2010	4:10:56 PM	Bypass valve opened
12/29/2010	4:10:56 PM	Helium MFC set to  0.000000
12/29/2010	4:10:56 PM	H2 MFC set to  0.000000
12/29/2010	4:10:56 PM	BCl3 MFC set to  0.000000
12/29/2010	4:10:56 PM	PHl3 MFC set to  0.000000
12/29/2010	4:10:56 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:10:56 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:10:56 PM	Tube furnace set to 0
12/29/2010	4:11:56 PM	H2 valve closed
12/29/2010	4:11:56 PM	BCl3 valve closed
12/29/2010	4:11:56 PM	PH3 valve closed
12/29/2010	4:11:56 PM	SiCl4 pre valve closed
12/29/2010	4:11:56 PM	SiCl4 post valve closed
12/29/2010	4:11:56 PM	Bubbler valve closed
12/29/2010	4:11:56 PM	Helium valve opened
12/29/2010	4:11:56 PM	Main Vac valve opened
12/29/2010	4:11:56 PM	Bypass valve opened
12/29/2010	4:11:56 PM	Helium MFC set to  100.000000
12/29/2010	4:11:56 PM	H2 MFC set to  0.000000
12/29/2010	4:11:56 PM	BCl3 MFC set to  0.000000
12/29/2010	4:11:56 PM	PHl3 MFC set to  0.000000
12/29/2010	4:11:56 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:11:56 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:11:57 PM	Tube furnace set to 0
12/29/2010	4:12:57 PM	Helium valve closed
12/29/2010	4:12:57 PM	H2 valve closed
12/29/2010	4:12:57 PM	BCl3 valve closed
12/29/2010	4:12:57 PM	PH3 valve closed
12/29/2010	4:12:57 PM	SiCl4 pre valve closed
12/29/2010	4:12:57 PM	SiCl4 post valve closed
12/29/2010	4:12:57 PM	Bubbler valve closed
12/29/2010	4:12:57 PM	Main Vac valve opened
12/29/2010	4:12:57 PM	Bypass valve opened
12/29/2010	4:12:57 PM	Helium MFC set to  0.000000
12/29/2010	4:12:57 PM	H2 MFC set to  0.000000
12/29/2010	4:12:57 PM	BCl3 MFC set to  0.000000
12/29/2010	4:12:57 PM	PHl3 MFC set to  0.000000
12/29/2010	4:12:57 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:12:57 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:12:57 PM	Tube furnace set to 0
12/29/2010	4:12:58 PM	Run finished at 4:12 PM
12/29/2010	4:12:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	4:48:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	4:48:49 PM	Recipe started at 4:48 PM
12/29/2010	4:48:49 PM	Helium valve closed
12/29/2010	4:48:49 PM	H2 valve closed
12/29/2010	4:48:49 PM	BCl3 valve closed
12/29/2010	4:48:49 PM	PH3 valve closed
12/29/2010	4:48:49 PM	SiCl4 pre valve closed
12/29/2010	4:48:49 PM	SiCl4 post valve closed
12/29/2010	4:48:49 PM	Main Vac valve closed
12/29/2010	4:48:49 PM	Bubbler valve closed
12/29/2010	4:48:49 PM	Bypass valve opened
12/29/2010	4:48:49 PM	Helium MFC set to  0.000000
12/29/2010	4:48:49 PM	H2 MFC set to  0.000000
12/29/2010	4:48:49 PM	BCl3 MFC set to  0.000000
12/29/2010	4:48:49 PM	PHl3 MFC set to  0.000000
12/29/2010	4:48:49 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:48:49 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:48:49 PM	Tube furnace set to 0
12/29/2010	4:48:50 PM	Helium valve closed
12/29/2010	4:48:50 PM	H2 valve closed
12/29/2010	4:48:50 PM	BCl3 valve closed
12/29/2010	4:48:50 PM	PH3 valve closed
12/29/2010	4:48:50 PM	SiCl4 pre valve closed
12/29/2010	4:48:50 PM	SiCl4 post valve closed
12/29/2010	4:48:50 PM	Bubbler valve closed
12/29/2010	4:48:50 PM	Main Vac valve opened
12/29/2010	4:48:50 PM	Bypass valve opened
12/29/2010	4:48:50 PM	Helium MFC set to  0.000000
12/29/2010	4:48:50 PM	H2 MFC set to  0.000000
12/29/2010	4:48:50 PM	BCl3 MFC set to  0.000000
12/29/2010	4:48:50 PM	PHl3 MFC set to  0.000000
12/29/2010	4:48:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:48:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:48:50 PM	Tube furnace set to 0
12/29/2010	4:49:50 PM	H2 valve closed
12/29/2010	4:49:50 PM	BCl3 valve closed
12/29/2010	4:49:50 PM	PH3 valve closed
12/29/2010	4:49:50 PM	SiCl4 pre valve closed
12/29/2010	4:49:50 PM	SiCl4 post valve closed
12/29/2010	4:49:50 PM	Bubbler valve closed
12/29/2010	4:49:50 PM	Helium valve opened
12/29/2010	4:49:50 PM	Main Vac valve opened
12/29/2010	4:49:50 PM	Bypass valve opened
12/29/2010	4:49:50 PM	Helium MFC set to  100.000000
12/29/2010	4:49:50 PM	H2 MFC set to  0.000000
12/29/2010	4:49:50 PM	BCl3 MFC set to  0.000000
12/29/2010	4:49:50 PM	PHl3 MFC set to  0.000000
12/29/2010	4:49:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:49:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:49:50 PM	Tube furnace set to 0
12/29/2010	4:50:50 PM	Helium valve closed
12/29/2010	4:50:50 PM	H2 valve closed
12/29/2010	4:50:50 PM	BCl3 valve closed
12/29/2010	4:50:50 PM	PH3 valve closed
12/29/2010	4:50:50 PM	SiCl4 pre valve closed
12/29/2010	4:50:50 PM	SiCl4 post valve closed
12/29/2010	4:50:50 PM	Bubbler valve closed
12/29/2010	4:50:50 PM	Main Vac valve opened
12/29/2010	4:50:50 PM	Bypass valve opened
12/29/2010	4:50:50 PM	Helium MFC set to  0.000000
12/29/2010	4:50:50 PM	H2 MFC set to  0.000000
12/29/2010	4:50:50 PM	BCl3 MFC set to  0.000000
12/29/2010	4:50:50 PM	PHl3 MFC set to  0.000000
12/29/2010	4:50:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:50:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:50:50 PM	Tube furnace set to 0
12/29/2010	4:51:50 PM	H2 valve closed
12/29/2010	4:51:50 PM	BCl3 valve closed
12/29/2010	4:51:50 PM	PH3 valve closed
12/29/2010	4:51:50 PM	SiCl4 pre valve closed
12/29/2010	4:51:50 PM	SiCl4 post valve closed
12/29/2010	4:51:50 PM	Bubbler valve closed
12/29/2010	4:51:50 PM	Helium valve opened
12/29/2010	4:51:50 PM	Main Vac valve opened
12/29/2010	4:51:50 PM	Bypass valve opened
12/29/2010	4:51:50 PM	Helium MFC set to  100.000000
12/29/2010	4:51:50 PM	H2 MFC set to  0.000000
12/29/2010	4:51:50 PM	BCl3 MFC set to  0.000000
12/29/2010	4:51:50 PM	PHl3 MFC set to  0.000000
12/29/2010	4:51:50 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:51:50 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:51:51 PM	Tube furnace set to 0
12/29/2010	4:52:51 PM	Helium valve closed
12/29/2010	4:52:51 PM	H2 valve closed
12/29/2010	4:52:51 PM	BCl3 valve closed
12/29/2010	4:52:51 PM	PH3 valve closed
12/29/2010	4:52:51 PM	SiCl4 pre valve closed
12/29/2010	4:52:51 PM	SiCl4 post valve closed
12/29/2010	4:52:51 PM	Bubbler valve closed
12/29/2010	4:52:51 PM	Main Vac valve opened
12/29/2010	4:52:51 PM	Bypass valve opened
12/29/2010	4:52:51 PM	Helium MFC set to  0.000000
12/29/2010	4:52:51 PM	H2 MFC set to  0.000000
12/29/2010	4:52:51 PM	BCl3 MFC set to  0.000000
12/29/2010	4:52:51 PM	PHl3 MFC set to  0.000000
12/29/2010	4:52:51 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:52:51 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:52:51 PM	Tube furnace set to 0
12/29/2010	4:53:51 PM	H2 valve closed
12/29/2010	4:53:51 PM	BCl3 valve closed
12/29/2010	4:53:51 PM	PH3 valve closed
12/29/2010	4:53:51 PM	SiCl4 pre valve closed
12/29/2010	4:53:51 PM	SiCl4 post valve closed
12/29/2010	4:53:51 PM	Bubbler valve closed
12/29/2010	4:53:51 PM	Helium valve opened
12/29/2010	4:53:51 PM	Main Vac valve opened
12/29/2010	4:53:51 PM	Bypass valve opened
12/29/2010	4:53:51 PM	Helium MFC set to  100.000000
12/29/2010	4:53:51 PM	H2 MFC set to  0.000000
12/29/2010	4:53:51 PM	BCl3 MFC set to  0.000000
12/29/2010	4:53:51 PM	PHl3 MFC set to  0.000000
12/29/2010	4:53:51 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:53:51 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:53:51 PM	Tube furnace set to 0
12/29/2010	4:54:51 PM	Helium valve closed
12/29/2010	4:54:51 PM	H2 valve closed
12/29/2010	4:54:51 PM	BCl3 valve closed
12/29/2010	4:54:51 PM	PH3 valve closed
12/29/2010	4:54:51 PM	SiCl4 pre valve closed
12/29/2010	4:54:51 PM	SiCl4 post valve closed
12/29/2010	4:54:51 PM	Bubbler valve closed
12/29/2010	4:54:51 PM	Main Vac valve opened
12/29/2010	4:54:51 PM	Bypass valve opened
12/29/2010	4:54:51 PM	Helium MFC set to  0.000000
12/29/2010	4:54:51 PM	H2 MFC set to  0.000000
12/29/2010	4:54:51 PM	BCl3 MFC set to  0.000000
12/29/2010	4:54:51 PM	PHl3 MFC set to  0.000000
12/29/2010	4:54:51 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:54:51 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:54:51 PM	Tube furnace set to 0
12/29/2010	4:55:51 PM	H2 valve closed
12/29/2010	4:55:51 PM	BCl3 valve closed
12/29/2010	4:55:51 PM	PH3 valve closed
12/29/2010	4:55:51 PM	SiCl4 pre valve closed
12/29/2010	4:55:51 PM	SiCl4 post valve closed
12/29/2010	4:55:51 PM	Bubbler valve closed
12/29/2010	4:55:51 PM	Helium valve opened
12/29/2010	4:55:51 PM	Main Vac valve opened
12/29/2010	4:55:51 PM	Bypass valve opened
12/29/2010	4:55:51 PM	Helium MFC set to  100.000000
12/29/2010	4:55:51 PM	H2 MFC set to  0.000000
12/29/2010	4:55:51 PM	BCl3 MFC set to  0.000000
12/29/2010	4:55:51 PM	PHl3 MFC set to  0.000000
12/29/2010	4:55:51 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:55:51 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:55:51 PM	Tube furnace set to 0
12/29/2010	4:56:51 PM	Helium valve closed
12/29/2010	4:56:51 PM	H2 valve closed
12/29/2010	4:56:51 PM	BCl3 valve closed
12/29/2010	4:56:51 PM	PH3 valve closed
12/29/2010	4:56:51 PM	SiCl4 pre valve closed
12/29/2010	4:56:51 PM	SiCl4 post valve closed
12/29/2010	4:56:51 PM	Bubbler valve closed
12/29/2010	4:56:51 PM	Main Vac valve opened
12/29/2010	4:56:51 PM	Bypass valve opened
12/29/2010	4:56:51 PM	Helium MFC set to  0.000000
12/29/2010	4:56:51 PM	H2 MFC set to  0.000000
12/29/2010	4:56:51 PM	BCl3 MFC set to  0.000000
12/29/2010	4:56:51 PM	PHl3 MFC set to  0.000000
12/29/2010	4:56:51 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:56:51 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:56:52 PM	Tube furnace set to 0
12/29/2010	4:57:52 PM	H2 valve closed
12/29/2010	4:57:52 PM	BCl3 valve closed
12/29/2010	4:57:52 PM	PH3 valve closed
12/29/2010	4:57:52 PM	SiCl4 pre valve closed
12/29/2010	4:57:52 PM	SiCl4 post valve closed
12/29/2010	4:57:52 PM	Bubbler valve closed
12/29/2010	4:57:52 PM	Helium valve opened
12/29/2010	4:57:52 PM	Main Vac valve opened
12/29/2010	4:57:52 PM	Bypass valve opened
12/29/2010	4:57:52 PM	Helium MFC set to  100.000000
12/29/2010	4:57:52 PM	H2 MFC set to  0.000000
12/29/2010	4:57:52 PM	BCl3 MFC set to  0.000000
12/29/2010	4:57:52 PM	PHl3 MFC set to  0.000000
12/29/2010	4:57:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:57:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:57:52 PM	Tube furnace set to 0
12/29/2010	4:58:52 PM	Helium valve closed
12/29/2010	4:58:52 PM	H2 valve closed
12/29/2010	4:58:52 PM	BCl3 valve closed
12/29/2010	4:58:52 PM	PH3 valve closed
12/29/2010	4:58:52 PM	SiCl4 pre valve closed
12/29/2010	4:58:52 PM	SiCl4 post valve closed
12/29/2010	4:58:52 PM	Bubbler valve closed
12/29/2010	4:58:52 PM	Main Vac valve opened
12/29/2010	4:58:52 PM	Bypass valve opened
12/29/2010	4:58:52 PM	Helium MFC set to  0.000000
12/29/2010	4:58:52 PM	H2 MFC set to  0.000000
12/29/2010	4:58:52 PM	BCl3 MFC set to  0.000000
12/29/2010	4:58:52 PM	PHl3 MFC set to  0.000000
12/29/2010	4:58:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:58:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:58:52 PM	Tube furnace set to 0
12/29/2010	4:59:52 PM	H2 valve closed
12/29/2010	4:59:52 PM	BCl3 valve closed
12/29/2010	4:59:52 PM	PH3 valve closed
12/29/2010	4:59:52 PM	SiCl4 pre valve closed
12/29/2010	4:59:52 PM	SiCl4 post valve closed
12/29/2010	4:59:52 PM	Bubbler valve closed
12/29/2010	4:59:52 PM	Helium valve opened
12/29/2010	4:59:52 PM	Main Vac valve opened
12/29/2010	4:59:52 PM	Bypass valve opened
12/29/2010	4:59:52 PM	Helium MFC set to  100.000000
12/29/2010	4:59:52 PM	H2 MFC set to  0.000000
12/29/2010	4:59:52 PM	BCl3 MFC set to  0.000000
12/29/2010	4:59:52 PM	PHl3 MFC set to  0.000000
12/29/2010	4:59:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	4:59:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	4:59:52 PM	Tube furnace set to 0
12/29/2010	5:00:52 PM	Helium valve closed
12/29/2010	5:00:52 PM	H2 valve closed
12/29/2010	5:00:52 PM	BCl3 valve closed
12/29/2010	5:00:52 PM	PH3 valve closed
12/29/2010	5:00:52 PM	SiCl4 pre valve closed
12/29/2010	5:00:52 PM	SiCl4 post valve closed
12/29/2010	5:00:52 PM	Bubbler valve closed
12/29/2010	5:00:52 PM	Main Vac valve opened
12/29/2010	5:00:52 PM	Bypass valve opened
12/29/2010	5:00:52 PM	Helium MFC set to  0.000000
12/29/2010	5:00:52 PM	H2 MFC set to  0.000000
12/29/2010	5:00:52 PM	BCl3 MFC set to  0.000000
12/29/2010	5:00:52 PM	PHl3 MFC set to  0.000000
12/29/2010	5:00:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:00:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:00:52 PM	Tube furnace set to 0
12/29/2010	5:01:52 PM	H2 valve closed
12/29/2010	5:01:52 PM	BCl3 valve closed
12/29/2010	5:01:52 PM	PH3 valve closed
12/29/2010	5:01:52 PM	SiCl4 pre valve closed
12/29/2010	5:01:52 PM	SiCl4 post valve closed
12/29/2010	5:01:52 PM	Bubbler valve closed
12/29/2010	5:01:52 PM	Helium valve opened
12/29/2010	5:01:52 PM	Main Vac valve opened
12/29/2010	5:01:52 PM	Bypass valve opened
12/29/2010	5:01:52 PM	Helium MFC set to  100.000000
12/29/2010	5:01:52 PM	H2 MFC set to  0.000000
12/29/2010	5:01:52 PM	BCl3 MFC set to  0.000000
12/29/2010	5:01:52 PM	PHl3 MFC set to  0.000000
12/29/2010	5:01:52 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:01:52 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:01:53 PM	Tube furnace set to 0
12/29/2010	5:02:53 PM	Helium valve closed
12/29/2010	5:02:53 PM	H2 valve closed
12/29/2010	5:02:53 PM	BCl3 valve closed
12/29/2010	5:02:53 PM	PH3 valve closed
12/29/2010	5:02:53 PM	SiCl4 pre valve closed
12/29/2010	5:02:53 PM	SiCl4 post valve closed
12/29/2010	5:02:53 PM	Bubbler valve closed
12/29/2010	5:02:53 PM	Main Vac valve opened
12/29/2010	5:02:53 PM	Bypass valve opened
12/29/2010	5:02:53 PM	Helium MFC set to  0.000000
12/29/2010	5:02:53 PM	H2 MFC set to  0.000000
12/29/2010	5:02:53 PM	BCl3 MFC set to  0.000000
12/29/2010	5:02:53 PM	PHl3 MFC set to  0.000000
12/29/2010	5:02:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:02:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:02:53 PM	Tube furnace set to 0
12/29/2010	5:03:53 PM	H2 valve closed
12/29/2010	5:03:53 PM	BCl3 valve closed
12/29/2010	5:03:53 PM	PH3 valve closed
12/29/2010	5:03:53 PM	SiCl4 pre valve closed
12/29/2010	5:03:53 PM	SiCl4 post valve closed
12/29/2010	5:03:53 PM	Bubbler valve closed
12/29/2010	5:03:53 PM	Helium valve opened
12/29/2010	5:03:53 PM	Main Vac valve opened
12/29/2010	5:03:53 PM	Bypass valve opened
12/29/2010	5:03:53 PM	Helium MFC set to  100.000000
12/29/2010	5:03:53 PM	H2 MFC set to  0.000000
12/29/2010	5:03:53 PM	BCl3 MFC set to  0.000000
12/29/2010	5:03:53 PM	PHl3 MFC set to  0.000000
12/29/2010	5:03:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:03:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:03:53 PM	Tube furnace set to 0
12/29/2010	5:04:53 PM	Helium valve closed
12/29/2010	5:04:53 PM	H2 valve closed
12/29/2010	5:04:53 PM	BCl3 valve closed
12/29/2010	5:04:53 PM	PH3 valve closed
12/29/2010	5:04:53 PM	SiCl4 pre valve closed
12/29/2010	5:04:53 PM	SiCl4 post valve closed
12/29/2010	5:04:53 PM	Bubbler valve closed
12/29/2010	5:04:53 PM	Main Vac valve opened
12/29/2010	5:04:53 PM	Bypass valve opened
12/29/2010	5:04:53 PM	Helium MFC set to  0.000000
12/29/2010	5:04:53 PM	H2 MFC set to  0.000000
12/29/2010	5:04:53 PM	BCl3 MFC set to  0.000000
12/29/2010	5:04:53 PM	PHl3 MFC set to  0.000000
12/29/2010	5:04:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:04:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:04:53 PM	Tube furnace set to 0
12/29/2010	5:05:53 PM	H2 valve closed
12/29/2010	5:05:53 PM	BCl3 valve closed
12/29/2010	5:05:53 PM	PH3 valve closed
12/29/2010	5:05:53 PM	SiCl4 pre valve closed
12/29/2010	5:05:53 PM	SiCl4 post valve closed
12/29/2010	5:05:53 PM	Bubbler valve closed
12/29/2010	5:05:53 PM	Helium valve opened
12/29/2010	5:05:53 PM	Main Vac valve opened
12/29/2010	5:05:53 PM	Bypass valve opened
12/29/2010	5:05:53 PM	Helium MFC set to  100.000000
12/29/2010	5:05:53 PM	H2 MFC set to  0.000000
12/29/2010	5:05:53 PM	BCl3 MFC set to  0.000000
12/29/2010	5:05:53 PM	PHl3 MFC set to  0.000000
12/29/2010	5:05:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:05:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:05:53 PM	Tube furnace set to 0
12/29/2010	5:06:53 PM	Helium valve closed
12/29/2010	5:06:53 PM	H2 valve closed
12/29/2010	5:06:53 PM	BCl3 valve closed
12/29/2010	5:06:53 PM	PH3 valve closed
12/29/2010	5:06:53 PM	SiCl4 pre valve closed
12/29/2010	5:06:53 PM	SiCl4 post valve closed
12/29/2010	5:06:53 PM	Bubbler valve closed
12/29/2010	5:06:53 PM	Main Vac valve opened
12/29/2010	5:06:53 PM	Bypass valve opened
12/29/2010	5:06:53 PM	Helium MFC set to  0.000000
12/29/2010	5:06:53 PM	H2 MFC set to  0.000000
12/29/2010	5:06:53 PM	BCl3 MFC set to  0.000000
12/29/2010	5:06:53 PM	PHl3 MFC set to  0.000000
12/29/2010	5:06:53 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:06:53 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:06:54 PM	Tube furnace set to 0
12/29/2010	5:07:54 PM	H2 valve closed
12/29/2010	5:07:54 PM	BCl3 valve closed
12/29/2010	5:07:54 PM	PH3 valve closed
12/29/2010	5:07:54 PM	SiCl4 pre valve closed
12/29/2010	5:07:54 PM	SiCl4 post valve closed
12/29/2010	5:07:54 PM	Bubbler valve closed
12/29/2010	5:07:54 PM	Helium valve opened
12/29/2010	5:07:54 PM	Main Vac valve opened
12/29/2010	5:07:54 PM	Bypass valve opened
12/29/2010	5:07:54 PM	Helium MFC set to  100.000000
12/29/2010	5:07:54 PM	H2 MFC set to  0.000000
12/29/2010	5:07:54 PM	BCl3 MFC set to  0.000000
12/29/2010	5:07:54 PM	PHl3 MFC set to  0.000000
12/29/2010	5:07:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:07:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:07:54 PM	Tube furnace set to 0
12/29/2010	5:08:54 PM	Helium valve closed
12/29/2010	5:08:54 PM	H2 valve closed
12/29/2010	5:08:54 PM	BCl3 valve closed
12/29/2010	5:08:54 PM	PH3 valve closed
12/29/2010	5:08:54 PM	SiCl4 pre valve closed
12/29/2010	5:08:54 PM	SiCl4 post valve closed
12/29/2010	5:08:54 PM	Bubbler valve closed
12/29/2010	5:08:54 PM	Main Vac valve opened
12/29/2010	5:08:54 PM	Bypass valve opened
12/29/2010	5:08:54 PM	Helium MFC set to  0.000000
12/29/2010	5:08:54 PM	H2 MFC set to  0.000000
12/29/2010	5:08:54 PM	BCl3 MFC set to  0.000000
12/29/2010	5:08:54 PM	PHl3 MFC set to  0.000000
12/29/2010	5:08:54 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:08:54 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:08:54 PM	Tube furnace set to 0
12/29/2010	5:08:55 PM	Run finished at 5:08 PM
12/29/2010	5:08:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/29/2010	5:33:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	5:33:02 PM	Recipe started at 5:33 PM
12/29/2010	5:33:02 PM	Helium valve closed
12/29/2010	5:33:03 PM	H2 valve closed
12/29/2010	5:33:03 PM	BCl3 valve closed
12/29/2010	5:33:03 PM	PH3 valve closed
12/29/2010	5:33:03 PM	SiCl4 pre valve closed
12/29/2010	5:33:03 PM	SiCl4 post valve closed
12/29/2010	5:33:03 PM	Main Vac valve closed
12/29/2010	5:33:03 PM	Bypass valve closed
12/29/2010	5:33:03 PM	Bubbler valve closed
12/29/2010	5:33:03 PM	Helium MFC set to  0.000000
12/29/2010	5:33:03 PM	H2 MFC set to  0.000000
12/29/2010	5:33:03 PM	BCl3 MFC set to  0.000000
12/29/2010	5:33:03 PM	PHl3 MFC set to  0.000000
12/29/2010	5:33:03 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:33:03 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:33:03 PM	Tube furnace set to 0
12/29/2010	5:33:03 PM	Run finished at 5:33 PM
12/29/2010	5:33:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	5:34:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	5:34:18 PM	Recipe started at 5:34 PM
12/29/2010	5:34:18 PM	Helium valve closed
12/29/2010	5:34:18 PM	H2 valve closed
12/29/2010	5:34:18 PM	BCl3 valve closed
12/29/2010	5:34:18 PM	PH3 valve closed
12/29/2010	5:34:18 PM	SiCl4 pre valve closed
12/29/2010	5:34:18 PM	SiCl4 post valve closed
12/29/2010	5:34:18 PM	Main Vac valve closed
12/29/2010	5:34:18 PM	Bubbler valve closed
12/29/2010	5:34:18 PM	Bypass valve opened
12/29/2010	5:34:18 PM	Helium MFC set to  0.000000
12/29/2010	5:34:18 PM	H2 MFC set to  0.000000
12/29/2010	5:34:18 PM	BCl3 MFC set to  0.000000
12/29/2010	5:34:18 PM	PHl3 MFC set to  0.000000
12/29/2010	5:34:18 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:34:18 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:34:19 PM	Tube furnace set to 0
12/29/2010	5:34:19 PM	Helium valve closed
12/29/2010	5:34:19 PM	H2 valve closed
12/29/2010	5:34:19 PM	BCl3 valve closed
12/29/2010	5:34:19 PM	PH3 valve closed
12/29/2010	5:34:19 PM	SiCl4 pre valve closed
12/29/2010	5:34:19 PM	SiCl4 post valve closed
12/29/2010	5:34:19 PM	Bubbler valve closed
12/29/2010	5:34:19 PM	Main Vac valve opened
12/29/2010	5:34:19 PM	Bypass valve opened
12/29/2010	5:34:19 PM	Helium MFC set to  0.000000
12/29/2010	5:34:19 PM	H2 MFC set to  0.000000
12/29/2010	5:34:19 PM	BCl3 MFC set to  0.000000
12/29/2010	5:34:19 PM	PHl3 MFC set to  0.000000
12/29/2010	5:34:19 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:34:19 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:34:19 PM	Tube furnace set to 0
12/29/2010	5:34:19 PM	Run finished at 5:34 PM
12/29/2010	5:34:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/29/2010	5:35:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	5:35:08 PM	Recipe started at 5:35 PM
12/29/2010	5:35:08 PM	Helium valve closed
12/29/2010	5:35:08 PM	H2 valve closed
12/29/2010	5:35:08 PM	BCl3 valve closed
12/29/2010	5:35:08 PM	PH3 valve closed
12/29/2010	5:35:08 PM	SiCl4 pre valve closed
12/29/2010	5:35:08 PM	SiCl4 post valve closed
12/29/2010	5:35:08 PM	Main Vac valve closed
12/29/2010	5:35:08 PM	Bypass valve closed
12/29/2010	5:35:08 PM	Bubbler valve closed
12/29/2010	5:35:08 PM	Helium MFC set to  0.000000
12/29/2010	5:35:08 PM	H2 MFC set to  0.000000
12/29/2010	5:35:08 PM	BCl3 MFC set to  0.000000
12/29/2010	5:35:08 PM	PHl3 MFC set to  0.000000
12/29/2010	5:35:08 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:35:08 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:35:08 PM	Tube furnace set to 0
12/29/2010	5:35:08 PM	Run finished at 5:35 PM
12/29/2010	5:35:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/29/2010	5:36:12 PM	Recipe started at 5:36 PM
12/29/2010	5:36:12 PM	Helium valve closed
12/29/2010	5:36:12 PM	BCl3 valve closed
12/29/2010	5:36:12 PM	PH3 valve closed
12/29/2010	5:36:12 PM	SiCl4 pre valve closed
12/29/2010	5:36:12 PM	SiCl4 post valve closed
12/29/2010	5:36:12 PM	Main Vac valve closed
12/29/2010	5:36:12 PM	Bypass valve closed
12/29/2010	5:36:12 PM	Bubbler valve closed
12/29/2010	5:36:12 PM	H2 valve opened
12/29/2010	5:36:12 PM	Helium MFC set to  0.000000
12/29/2010	5:36:12 PM	H2 MFC set to  500.000000
12/29/2010	5:36:12 PM	BCl3 MFC set to  0.000000
12/29/2010	5:36:12 PM	PHl3 MFC set to  0.000000
12/29/2010	5:36:12 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:36:12 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:36:12 PM	Tube furnace set to 100
12/29/2010	5:37:32 PM	Helium valve closed
12/29/2010	5:37:32 PM	BCl3 valve closed
12/29/2010	5:37:32 PM	PH3 valve closed
12/29/2010	5:37:32 PM	SiCl4 pre valve closed
12/29/2010	5:37:32 PM	SiCl4 post valve closed
12/29/2010	5:37:32 PM	Main Vac valve closed
12/29/2010	5:37:32 PM	Bypass valve closed
12/29/2010	5:37:32 PM	H2 valve opened
12/29/2010	5:37:32 PM	Bubbler valve opened
12/29/2010	5:37:32 PM	Helium MFC set to  0.000000
12/29/2010	5:37:32 PM	H2 MFC set to  500.000000
12/29/2010	5:37:32 PM	BCl3 MFC set to  0.000000
12/29/2010	5:37:32 PM	PHl3 MFC set to  0.000000
12/29/2010	5:37:32 PM	SiCl4 MFC set to  0.000000
12/29/2010	5:37:32 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:37:32 PM	Tube furnace set to 1000
12/29/2010	5:57:32 PM	Helium valve closed
12/29/2010	5:57:32 PM	PH3 valve closed
12/29/2010	5:57:32 PM	Main Vac valve closed
12/29/2010	5:57:32 PM	Bypass valve closed
12/29/2010	5:57:32 PM	H2 valve opened
12/29/2010	5:57:32 PM	BCl3 valve opened
12/29/2010	5:57:32 PM	SiCl4 pre valve opened
12/29/2010	5:57:32 PM	SiCl4 post valve opened
12/29/2010	5:57:32 PM	Bubbler valve opened
12/29/2010	5:57:32 PM	Helium MFC set to  0.000000
12/29/2010	5:57:32 PM	H2 MFC set to  500.000000
12/29/2010	5:57:32 PM	BCl3 MFC set to  3.000000
12/29/2010	5:57:32 PM	PHl3 MFC set to  0.000000
12/29/2010	5:57:32 PM	SiCl4 MFC set to  50.000000
12/29/2010	5:57:32 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	5:57:32 PM	Tube furnace set to 1000
12/29/2010	6:17:32 PM	H2 valve closed
12/29/2010	6:17:32 PM	BCl3 valve closed
12/29/2010	6:17:32 PM	PH3 valve closed
12/29/2010	6:17:32 PM	SiCl4 pre valve closed
12/29/2010	6:17:32 PM	SiCl4 post valve closed
12/29/2010	6:17:32 PM	Main Vac valve closed
12/29/2010	6:17:32 PM	Bypass valve closed
12/29/2010	6:17:32 PM	Helium valve opened
12/29/2010	6:17:32 PM	Bubbler valve opened
12/29/2010	6:17:32 PM	Helium MFC set to  500.000000
12/29/2010	6:17:32 PM	H2 MFC set to  0.000000
12/29/2010	6:17:32 PM	BCl3 MFC set to  0.000000
12/29/2010	6:17:32 PM	PHl3 MFC set to  0.000000
12/29/2010	6:17:32 PM	SiCl4 MFC set to  0.000000
12/29/2010	6:17:32 PM	Bypass solenoid MFC set to  0.000000
12/29/2010	6:17:33 PM	Tube furnace set to 0
12/29/2010	6:17:33 PM	Helium valve closed
12/29/2010	6:17:33 PM	H2 valve closed
12/29/2010	6:17:33 PM	BCl3 valve closed
12/29/2010	6:17:33 PM	PH3 valve closed
12/29/2010	6:17:33 PM	SiCl4 pre valve closed
12/29/2010	6:17:33 PM	SiCl4 post valve closed
12/29/2010	6:17:33 PM	Main Vac valve closed
12/29/2010	6:17:33 PM	Bubbler valve closed
12/29/2010	6:17:33 PM	Bypass valve closed
12/29/2010	6:17:33 PM	Helium MFC set to  0.000000
12/29/2010	6:17:33 PM	H2 MFC set to  0.000000
12/29/2010	6:17:33 PM	BCl3 MFC set to  0.000000
12/29/2010	6:17:33 PM	PHl3 MFC set to  0.000000
12/29/2010	6:17:33 PM	SiCl4 MFC set to  0.000000
12/29/2010	6:17:33 PM	Bypass solenoid MFC set to  760.000000
12/29/2010	6:17:33 PM	Tube furnace set to 0
12/29/2010	6:17:33 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
